I-Semicera's 8 Inch N-type SiC Wafers ihamba phambili ekusungulweni kwe-semiconductor, ihlinzeka ngesisekelo esiqinile sokuthuthukiswa kwezinto zikagesi ezisebenza kahle kakhulu. Lawa mawafa aklanyelwe ukuhlangabezana nezidingo ezinzima zezinhlelo zokusebenza zesimanje ze-elekthronikhi, kusukela kugesi wamandla kuya kumasekhethi anemvamisa ephezulu.
I-doping yohlobo lwe-N kulawa mawafa e-SiC athuthukisa ukusebenza kwawo kagesi, kuwenze alungele uhla olubanzi lwezinhlelo zokusebenza, okuhlanganisa ama-diode amandla, ama-transistors, nama-amplifiers. I-conductivity ephezulu iqinisekisa ukulahleka kwamandla okuncane nokusebenza kahle, okubalulekile kumadivayisi asebenza kumafrikhwensi aphezulu kanye namazinga wamandla.
I-Semicera isebenzisa amasu okukhiqiza athuthukile ukuze ikhiqize ama-wafer e-SiC anokufaniswa okukhethekile kwendawo kanye namaphutha amancane. Leli zinga lokunemba libalulekile ezinhlelweni zokusebenza ezidinga ukusebenza okungaguquki nokuqina, njengezimboni ze-aerospace, zezimoto, nezokuxhumana.
Ukufaka ama-SiC Wafers we-Semicera angu-8 Intshi N-uhlobo emugqeni wakho wokukhiqiza kunikeza isisekelo sokudala izingxenye ezingamelana nezimo ezibucayi nezinga lokushisa eliphezulu. Lawa mawafa alungele ukusetshenziswa ekuguquleni amandla, ubuchwepheshe be-RF, nezinye izinkambu ezifunayo.
Ukukhetha i-Semicera's 8 Inch N-type SiC Wafers kusho ukutshala imali emkhiqizweni ohlanganisa isayensi yezinto ezibonakalayo yekhwalithi ephezulu nobunjiniyela obunembayo. I-Semicera izibophezele ekuthuthukiseni amakhono obuchwepheshe be-semiconductor, ihlinzeka ngezixazululo ezithuthukisa ukusebenza kahle nokuthembeka kwamadivayisi akho kagesi.
Izinto | Ukukhiqiza | Ucwaningo | Dummy |
I-Crystal Parameters | |||
I-Polytype | 4H | ||
Iphutha lokuma kobuso | <11-20 >4±0.15° | ||
Amapharamitha kagesi | |||
I-Dopant | n-uhlobo lweNitrojeni | ||
Ukungazweli | 0.015-0.025ohm · cm | ||
Mechanical Parameters | |||
Ububanzi | 150.0±0.2mm | ||
Ubukhulu | 350±25 μm | ||
Umumo oyisicaba oyinhloko | [1-100]±5° | ||
Ubude obuyisicaba obuyisisekelo | 47.5±1.5mm | ||
Ifulethi lesibili | Lutho | ||
I-TTV | ≤5 μm | ≤10 μm | ≤15 μm |
I-LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Khothama | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
I-Wap | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | I-Ra≤0.2nm (5μm*5μm) | ||
Isakhiwo | |||
Ukuminyana kwe-Micropipe | <1 eya/cm2 | <10 kwe/cm2 | <15 kwe/cm2 |
Ukungcola kwensimbi | ≤5E10 ama-athomu/cm2 | NA | |
I-BPD | ≤1500 i-e/cm2 | ≤3000 i-e/cm2 | NA |
I-TSD | ≤500 i-e/cm2 | ≤1000 i-e/cm2 | NA |
Ikhwalithi Yangaphambili | |||
Ngaphambili | Si | ||
Ukuqedwa kobuso | I-Si-face CMP | ||
Izinhlayiya | ≤60ea/wafer (usayizi≥0.3μm) | NA | |
Ukuklwebheka | ≤5ea/mm. Ubude obuqongelelwe ≤Ububanzi | Ubude obuqongelelwe≤2*Ububanzi | NA |
Ikhasi eliwolintshi/imigodi/amabala/ama-striations/ imifantu/ukungcola | Lutho | NA | |
Ama-Edge chips/indents/fracture/hex plate | Lutho | ||
Izindawo ze-Polytype | Lutho | Indawo eqoqiwe≤20% | Indawo eqoqiwe≤30% |
Ukumaka kwe-laser yangaphambili | Lutho | ||
Ikhwalithi Emuva | |||
Emuva ekupheleni | C-face CMP | ||
Ukuklwebheka | ≤5ea/mm, Ubude obuqongelelayo≤2*Ububanzi | NA | |
Ukukhubazeka kwasemuva (ama-edge chips/indents) | Lutho | ||
Ukuhwalala emuva | I-Ra≤0.2nm (5μm*5μm) | ||
Ukumaka kwe-laser emuva | 1 mm (kusuka emaphethelweni aphezulu) | ||
Umphetho | |||
Umphetho | I-Chamfer | ||
Ukupakisha | |||
Ukupakisha | I-Epi-ilungile ngokufakwa kwe-vacuum Ukupakishwa kwekhasethi le-multi-wafer | ||
*Amanothi: "NA" kusho ukuthi asikho isicelo Izinto ezingashiwongo zingabhekisa ku-SEMI-STD. |