8 Intshi N-uhlobo lweSiC Wafer

Incazelo emfushane:

Ama-SiC Wafers we-Semicera angu-8 Inch N-uhlobo lwe-SiC aklanyelwe izinhlelo zokusebenza ezisezingeni eliphezulu kugesi wamandla aphezulu kanye nemvamisa ephezulu. Lawa mawafa ahlinzeka ngezinto ezingcono kakhulu zikagesi nezishisayo, eziqinisekisa ukusebenza kahle ezindaweni ezidinga kakhulu. I-Semicera iletha emisha nokuthembeka ezintweni ezisetshenziswayo ze-semiconductor.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Semicera's 8 Inch N-type SiC Wafers ihamba phambili ekusungulweni kwe-semiconductor, ihlinzeka ngesisekelo esiqinile sokuthuthukiswa kwezinto zikagesi ezisebenza kahle kakhulu. Lawa mawafa aklanyelwe ukuhlangabezana nezidingo ezinzima zezinhlelo zokusebenza zesimanje ze-elekthronikhi, kusukela kugesi wamandla kuya kumasekhethi anemvamisa ephezulu.

I-doping yohlobo lwe-N kulawa mawafa e-SiC athuthukisa ukusebenza kwawo kagesi, kuwenze alungele uhla olubanzi lwezinhlelo zokusebenza, okuhlanganisa ama-diode amandla, ama-transistors, nama-amplifiers. I-conductivity ephezulu iqinisekisa ukulahleka kwamandla okuncane nokusebenza kahle, okubalulekile kumadivayisi asebenza kumafrikhwensi aphezulu kanye namazinga wamandla.

I-Semicera isebenzisa amasu okukhiqiza athuthukile ukuze ikhiqize ama-wafer e-SiC anokufaniswa okukhethekile kwendawo kanye namaphutha amancane. Leli zinga lokunemba libalulekile ezinhlelweni zokusebenza ezidinga ukusebenza okungaguquki nokuqina, njengezimboni ze-aerospace, zezimoto, nezokuxhumana.

Ukufaka ama-SiC Wafers we-Semicera angu-8 Intshi N-uhlobo emugqeni wakho wokukhiqiza kunikeza isisekelo sokudala izingxenye ezingamelana nezimo ezibucayi nezinga lokushisa eliphezulu. Lawa mawafa alungele ukusetshenziswa ekuguquleni amandla, ubuchwepheshe be-RF, nezinye izinkambu ezifunayo.

Ukukhetha i-Semicera's 8 Inch N-type SiC Wafers kusho ukutshala imali emkhiqizweni ohlanganisa isayensi yezinto ezibonakalayo yekhwalithi ephezulu nobunjiniyela obunembayo. I-Semicera izibophezele ekuthuthukiseni amakhono obuchwepheshe be-semiconductor, ihlinzeka ngezixazululo ezithuthukisa ukusebenza kahle nokuthembeka kwamadivayisi akho kagesi.

Izinto

Ukukhiqiza

Ucwaningo

Dummy

I-Crystal Parameters

I-Polytype

4H

Iphutha lokuma kobuso

<11-20 >4±0.15°

Amapharamitha kagesi

I-Dopant

n-uhlobo lweNitrojeni

Ukungazweli

0.015-0.025ohm · cm

Mechanical Parameters

Ububanzi

150.0±0.2mm

Ubukhulu

350±25 μm

Umumo oyisicaba oyinhloko

[1-100]±5°

Ubude obuyisicaba obuyisisekelo

47.5±1.5mm

Ifulethi lesibili

Lutho

I-TTV

≤5 μm

≤10 μm

≤15 μm

I-LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Khothama

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

I-Wap

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

I-Ra≤0.2nm (5μm*5μm)

Isakhiwo

Ukuminyana kwe-Micropipe

<1 eya/cm2

<10 kwe/cm2

<15 kwe/cm2

Ukungcola kwensimbi

≤5E10 ama-athomu/cm2

NA

I-BPD

≤1500 i-e/cm2

≤3000 i-e/cm2

NA

I-TSD

≤500 i-e/cm2

≤1000 i-e/cm2

NA

Ikhwalithi Yangaphambili

Ngaphambili

Si

Ukuqedwa kobuso

I-Si-face CMP

Izinhlayiya

≤60ea/wafer (usayizi≥0.3μm)

NA

Ukuklwebheka

≤5ea/mm. Ubude obuqongelelwe ≤Ububanzi

Ubude obuqongelelwe≤2*Ububanzi

NA

Ikhasi eliwolintshi/imigodi/amabala/ama-striations/ imifantu/ukungcola

Lutho

NA

Ama-Edge chips/indents/fracture/hex plate

Lutho

Izindawo ze-Polytype

Lutho

Indawo eqoqiwe≤20%

Indawo eqoqiwe≤30%

Ukumaka kwe-laser yangaphambili

Lutho

Ikhwalithi Emuva

Emuva ekupheleni

C-face CMP

Ukuklwebheka

≤5ea/mm, Ubude obuqongelelayo≤2*Ububanzi

NA

Ukukhubazeka kwasemuva (ama-edge chips/indents)

Lutho

Ukuhwalala emuva

I-Ra≤0.2nm (5μm*5μm)

Ukumaka kwe-laser emuva

1 mm (kusuka emaphethelweni aphezulu)

Umphetho

Umphetho

I-Chamfer

Ukupakisha

Ukupakisha

I-Epi-ilungile ngokufakwa kwe-vacuum

Ukupakishwa kwekhasethi le-multi-wafer

*Amanothi: "NA" kusho ukuthi asikho isicelo Izinto ezingashiwongo zingabhekisa ku-SEMI-STD.

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Ama-wafers e-SiC

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