I-Semicera'sI-Al2O3 Vacuum Chuckilungele ukukhiqizwa kwe-semiconductor, ikakhulukazi ezinhlelweni ezidinga ukunemba okuphezulu nokuthembeka. Yenziwe ngekhwalithi ephezulu ye-aluminium oxide (Al2O3), le vacuum chuck inozinzo oluhle kakhulu olushisayo kanye nokumelana nokugqwala kwamakhemikhali ukuze ihlangabezane nezidingo zezindawo zokucubungula ezinokhahlo. Ngomklamo olungiselelwe, i-Semicera iqinisekisa ukuthi yayoI-Al2O3 Vacuum Chuckingagcina amandla okubamba okuhle kakhulu ngaphansi kwezimo ezahlukahlukene zenqubo, iqinisekise ukusebenza kahle nokuphepha ngesikhathi sokucutshungulwa kwe-wafer.
Lapho ucubungulai-silicon nitride (Si3N4)futhii-silicon carbide (SiC)izinto zokwakha, i-Semicera's Al2O3 Vacuum Chuck ithuthukisa ngempumelelo ukufana nokuzinza kwe-vacuum clamping ngomklamo wayo ohlukile wesakhiwo. Lesi sici asigcini nje ukunciphisa ukulahlekelwa kwezinto ezibonakalayo, kodwa futhi sithuthukisa kakhulu ukusebenza kahle kokukhiqiza, ukuqinisekisa ukuthi isinyathelo ngasinye sokucubungula singafinyelela imiphumela engcono kakhulu.
Ngaphezu kwalokho, i-Semicera'sI-Al2O3 Vacuum Chuckihamba kahle kakhulu ekusebenzisaneni futhi ingaxhuma ngaphandle komthungo nemishini ehlukahlukene yokucubungula i-semiconductor ukuze ihlangabezane nezidingo zemigqa yokukhiqiza ehlukene. Kungakhathaliseki ukuthi kusesiteji se-R&D noma ekukhiqizweni ngobuningi, le vacuum chuck inganikeza ukwesekwa okuthembekile ukusiza amakhasimende avelele emakethe yokuncintisana.
I-Semicera ibilokhu izibophezele ekunikezeni amakhasimende izixazululo zokukhiqiza ze-semiconductor ezisebenza kahle kakhulu, futhi ukwethulwa kwe-Al2O3 Vacuum Chuck kuwukubonakaliswa kokuqamba okusha kwezobuchwepheshe nokuzibophezela kwekhwalithi. Ngokukhetha imikhiqizo ye-Semicera, amakhasimende azokwazi ukuthola ukusebenza okuhle kakhulu nokuthembeka, ngaleyo ndlela azuze izinqubo zokukhiqiza ezisebenza kahle kakhulu kanye nokuphuma komkhiqizo osezingeni eliphezulu.