I-Bulk CVD SiC Ring

Isithombe Esifakiwe Sendandatho ye-CVD SiC yobuningi

Incazelo emfushane:

Izindandatho eziningi ze-CVD SiC zisebenzisa igesi yomthombo we-silicon (njenge-silicon hydride) kanye negesi yomthombo wekhabhoni (njenge-methane) njengezinto zokusetshenziswa, ezisabela ezingeni lokushisa eliphezulu ukuze zifake izinto zosayizi omkhulu ze-SiC ku-substrate noma isikhunta. Le nqubo ivumela i-SiC ukuthi ifakwe ngokufana endaweni enkulu, yakha isakhiwo sendandatho esiqinile futhi esingaguquki.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Kungani i-Silicon Carbide Etching Ring?

I-RTPIzindandatho ze-CVD SiCasetshenziswa kakhulu emikhakheni yezimboni neyesayensi emazingeni okushisa aphezulu nasezindaweni ezonakalisayo. Idlala indima ebalulekile ekwenziweni kwe-semiconductor, i-optoelectronics, imishini yokunemba kanye nemboni yamakhemikhali. Izinhlelo zokusebenza ezithize zifaka:

1. Ukukhiqizwa kwe-semiconductor:I-RTP CVD SiC ikhalaingasetshenziselwa ukushisisa nokupholisa imishini ye-semiconductor, inikeze ukulawulwa kwezinga lokushisa okuzinzile kanye nokuqinisekisa ukunemba nokuvumelana kwenqubo.

2. I-Optoelectronics: Ngenxa ye-conductivity yayo enhle kakhulu yokushisa kanye nokumelana nokushisa okuphezulu, i-RTPIzindandatho ze-CVD SiCingasetshenziswa njengezinto zokusekela nezokukhipha ukushisa zama-lasers, imishini yokuxhumana ye-fiber optic kanye nezingxenye ze-optical.

3. Imishini enembile: Izindandatho ze-RTP CVD SiC zingasetshenziselwa ukunemba amathuluzi nezinto zokusebenza endaweni yokushisa ephezulu nezimo ezonakalisayo, njengeziko lokushisa eliphezulu, izisetshenziswa zevacuum nama-reactor amakhemikhali.

4. Imboni yamakhemikhali: Ngenxa yokumelana nokugqwala nokuzinza kwamakhemikhali, izindandatho ze-RTP CVD SiC zingasetshenziswa ezitsheni, amapayipi nama-reactors ekuphenduleni kwamakhemikhali kanye nezinqubo ze-catalytic.

Epi System

Isistimu ye-RTP

Uhlelo lwe-CVD

Ukusebenza komkhiqizo:

1. Hlangana nenqubo engaphansi kuka-28nm

2. Ukumelana nokugqwala okukhulu

3. Ukusebenza okuhlanzekile kakhulu

4. Ubulukhuni obukhulu

5. Ukuminyana okuphezulu

6. Ukumelana nokushisa okuphezulu

7. Ukumelana nokugqoka

Isicelo somkhiqizo:

Izinto ze-silicon carbide zinezici zokuqina okuphezulu, ukumelana nokugqoka, ukumelana nokugqwala kanye nokuzinza okuphezulu kwezinga lokushisa. Imikhiqizo esebenza kahle kakhulu ebanzi isetshenziswa kakhulu ku-etching eyomile kanye nezinqubo ze-TF/Diffusion.