I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.
Izindandatho ezenziwe ngokwezifiso ze-tantalum carbide ziyimikhiqizo yendandatho eklanywe ngayinye futhi yakhiwe ngokobuchwepheshe bokuhlanganisa i-tantalum carbide ngokusekelwe ezidingweni ezithile kanye nezidingo zokusetshenziswa kwamakhasimende.
Okulandelayo incazelo evamile yamasongo enziwe ngezifiso i-tantalum carbide:
1. Ukukhethwa kwempahla: Ngokwezidingo zamakhasimende, izinto zokwakha ze-tantalum ezihlanzekile kakhulu zikhethwa njenge-substrate yokuqinisekisa ikhwalithi nokusebenza komkhiqizo.
2. Usayizi nokuma: Ngokwezidingo noma imidwebo yokuklama enikezwa ikhasimende, ubukhulu, ububanzi, ukujiya kanye nokuma kwendandatho ehlanganisiwe ye-tantalum carbide kwenziwa ngokwezifiso ukuze ivumelane nezimo ezithile zohlelo lokusebenza kanye nezidingo zemishini.
3. Inqubo yokuhlanganisa i-Tantalum carbide: Ingaphezulu lendandatho ye-tantalum iphathwa kusetshenziswa inqubo yokugqoka ye-tantalum carbide ukuze kwakhiwe umfaniswano, ominyene futhi onamathela kahle we-tantalum carbide.
4. Ukumelana nokugqoka kanye nokumelana nokugqwala: Ngokuthuthukisa inqubo yokumboza kanye nemingcele, qinisekisa ukuthi indandatho ehlanganiswe ne-tantalum carbide inokumelana nokugqoka okuhle kakhulu kanye nokumelana nokugqwala ukuze ihlangabezane nezidingo zezindawo ezithile.
5. Ukusebenza kokuvala: Ngokuvumelana nezidingo zokuvala zekhasimende, ukwakheka kokuvala indandatho ye-tantalum carbide coated yakhelwe futhi yakhiwe ukuze kuqinisekiswe ukusebenza kahle kokuvala futhi kuvimbele ukuvuza kwegesi noma uketshezi.
6. Ukulawulwa Kwekhwalithi: Ngesikhathi senqubo yokwenza ngokwezifiso, ukulawulwa kwekhwalithi okuqinile nokuhlolwa kuyenziwa ukuze kuqinisekiswe ukuvumelana, ukwethembeka nokuhambisana kwemikhiqizo.
nge-TaC nangaphandle kwayo
Ngemva kokusebenzisa i-TaC (kwesokudla)
Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu:
