I-Fused Quartz Pedestal esuka ku-Semicera yakhiwe ngobunono ukuze inikeze ukusekela okungenakuqhathaniswa nokuzinza ezinhlelweni ezihlukahlukene zezinga lokushisa eliphezulu. Yakhelwe kusukai-quartz ehlanzekile kakhulu, lesi sisekelo silungele izinqubo ze-semiconductor, kuhlanganise nokusabalalisaisilucwecwanainqubo kanye ne-LPCVD. Ukumelana nokushisa kwayo okukhethekile nokuqina kwamakhemikhali kuyenza ibe inketho efanelekile ezindaweni ezidinga kakhulu.
Kwa-Semicera, sibeka phambili ikhwalithi, siqinisekisa ukuthi imikhiqizo yethu yengilazi ye-quartz ehlanganisiwe ihlangabezana namazinga aphezulu kakhulu. Isisekelo se-quartz esihlanganisiwe asigcini nje ngokuthuthukisa ukusebenza kodwa futhi sinikeza isixazululo esingabizi kakhulu kulabo abafuna izinketho ezithembekile zengilazi ye-silica ehlanganisiwe. Noma ngabe uyidinga ezinhlelweni ze-semiconductor quartz noma okunye ukusetshenziswa okukhethekile, isisekelo sethu sigqama ngokuqina nokunemba kwaso.
Izinzuzo ze-Fused Quartz Material
1.Ukumelana Nokushisa Okuphezulu
I-Fused Quartz Pedestal inendawo yokuthambisa ecishe ibe ngu-1730°C, eyivumela ukuthi imelane nokusetshenziswa isikhathi eside emazingeni okushisa asukela ku-1100°C kuya ku-1250°C. Ngaphezu kwalokho, ingakwazi ukubekezelela ukuchayeka isikhathi esifushane emazingeni okushisa afinyelela ku-1450°C.
2.Ukumelana Nokugqwala
I-Fused Quartz Pedestal ayisebenzi ngamakhemikhali kuma-acid amaningi, ngaphandle kwe-hydrofluoric acid. Ukumelana kwayo ne-asidi kudlula okwebumba izikhathi ezingu-30 nensimbi engagqwali izikhathi ezingu-150. Emazingeni okushisa aphakeme, ayikho enye into engafanelana nokuzinza kwamakhemikhali e-quartz ehlanganisiwe, okuyenza ibe ukukhetha okuhle ezindaweni zamakhemikhali ezinokhahlo.
3. Ukuzinza Okushisayo
Esinye sezici ezivelele ze-Fused Quartz Pedestal i-coefficient yayo encane yokwandisa okushisayo. Lesi sakhiwo siyivumela ukuthi imelane nokushintsha kwezinga lokushisa okunzima ngaphandle kokuqhekeka. Isibonelo, ingashiswa ngokushesha ku-1100 ° C bese icwiliswa emanzini ekamelweni lokushisa ngaphandle kokulondoloza umonakalo-isici esibalulekile sezinqubo zokukhiqiza ezicindezela kakhulu.