Izingxenye eziqinile ze-CVD SILICON CARBIDE zibonwa njengenketho eyinhloko yamasongo e-RTP/EPI nezisekelo kanye nezingxenye ze-plasmaetch cavity ezisebenza kumazinga okushisa adingekayo esistimu (>1500℃), izimfuneko zokuhlanzeka ziphezulu kakhulu (>99.9995%) futhi ukusebenza kuhle ikakhulukazi lapho ukumelana namakhemikhali kuphezulu kakhulu. Lezi zinto aziqukethe izigaba zesibili onqenqemeni lokusanhlamvu, ngakho izingxenye zazo zikhiqiza izinhlayiya ezimbalwa kunezinye izinto. Ngaphezu kwalokho, lezi zingxenye zingahlanzwa ngokusebenzisa i-HF/HCl eshisayo ngokuwohloka okuncane, okuholela ezinhlayiyeni ezimbalwa kanye nempilo ende yesevisi.