I-Isostatic PECVD Graphite Boat

Incazelo emfushane:

Isikebhe se-Isostatic PECVD se-graphite sisetshenziswa kakhulu kuzixhumanisi ezihlukahlukene zokukhiqiza i-semiconductor, njenge-polysilicon ifilimu deposition, ifilimu ye-oxide deposition, i-nitride film deposition, njll. Ukusebenza kwaso okuhle kakhulu kuyenza i-wafer carrier ekahle ohlelweni lwe-PECVD.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-SEMICERA isostatic PECVD graphite boat iwukuhlanzeka okuphezulu, umkhiqizo we-graphite ominyana kakhulu oklanyelwe ukusekelwa kwe-wafer kunqubo ye-PECVD (i-plasma ethuthukisiwe yokubeka umhwamuko wamakhemikhali). I-SEMICERA isebenzisa ubuchwepheshe obuphambili bokucindezela be-isostatic ukuze kuqinisekiswe ukuthi isikebhe se-graphite sinokumelana nezinga lokushisa eliphakeme kakhulu, ukumelana nokugqwala, ukuzinza kwe-dimensional kanye nokuhamba kahle kwe-thermal, okuyizinto ezisetshenziswayo ezibalulekile kwinqubo yokukhiqiza ye-semiconductor.

I-SEMICERA isostatic PECVD graphite boat inezinzuzo ezilandelayo:

▪ Ukuhlanzeka okuphezulu: Impahla ye-graphite inokuhlanzeka okuphezulu nokungcola okuphansi ukuze kugwenywe ukungcoliswa kwendawo eyisicwecwana.

▪ Ukuminyana okuphezulu: Ukuminyana okuphezulu, amandla aphezulu okusebenza, kungamelana nezinga lokushisa eliphezulu kanye nemvelo ene-vacuum ephezulu.

▪ Ukuzinza okuhle kwe-dimensional: Ushintsho oluncane lwe-dimensional ezingeni lokushisa eliphezulu ukuqinisekisa ukuzinza kwenqubo.

▪ I-thermal conductivity enhle kakhulu: Dlulisa kahle ukushisa ukuze uvimbele ukushisisa kwe-wafer.

▪ Ukumelana nokugqwala okuqinile: Iyakwazi ukumelana nokuguguleka ngamagesi agqwalayo ahlukahlukene kanye ne-plasma.

Ipharamitha yokusebenza	semicera	I-SGL R6510	Ipharamitha yokusebenza
Ukuminyana ngobuningi (g/cm3)	1.91	1.83	1.85
Amandla okugoba (MPa)	63	60	49
Amandla acindezelayo (MPa)	135	130	103
Ukuqina Kwasogwini (HS)	70	64	60
I-coefficient yokwanda kwe-thermal (10-6/K)	85	105	130
I-coefficient yokwanda kwe-thermal (10-6/K)	5.85	4.2	5.0
Ukungazweli (μΩm)	11-13	13	10

Izinzuzo zokusikhetha:
▪ Ukukhethwa kwezinto: Izinto ze-graphite ezihlanzekile zisetshenziselwa ukuqinisekisa ikhwalithi yomkhiqizo.
▪ Ubuchwepheshe bokucubungula: Ukucindezela kwe-Isostatic kusetshenziselwa ukuqinisekisa ukuminyana komkhiqizo nokufana.
▪ Ukwenza ngokwezifiso usayizi: Izikebhe ze-graphite ezinobukhulu obuhlukahlukene kanye nokuma zingenziwa ngokwezifiso kuye ngokwezidingo zamakhasimende.
▪ Ukwelashwa kwendawo: Izindlela ezihlukahlukene zokwelashwa ezingaphezulu zinikezwa, njengokumboza i-silicon carbide, i-boron nitride, njll., ukuze kuhlangatshezwane nezidingo zezinqubo ezihlukahlukene.