Inqubo yokukhula ye-silicon eyodwa ye-crystal yenziwa ngokuphelele emkhakheni oshisayo. Inkambu eshisayo ekahle ivumela ukuthuthukisa ikhwalithi yekristalu futhi inokusebenza kahle kwekristalu okuphezulu. Idizayini yenkambu eshisayo inquma kakhulu izinguquko kanye nezinguquko kumazinga okushisa endaweni yokushisa eguqukayo. Ukugeleza kwegesi ekamelweni lesithando somlilo kanye nomehluko wezinto ezisetshenziswa ensimini yokushisa kunquma ngokuqondile impilo yesevisi yensimu yokushisa. Inkambu eshisayo eklanywe ngendlela engafanele ayenzi nje kuphela ukuthi kube nzima ukukhulisa amakristalu ahlangabezana nezidingo zekhwalithi, kodwa futhi ayikwazi ukukhulisa amakristalu awodwa aphelele ngaphansi kwezidingo ezithile zenqubo. Kungakho imboni ye-silicon ye-Czochralski monocrystalline ibheka ukuklanywa kwensimu eshisayo njengobuchwepheshe obuyisisekelo futhi itshala amandla amakhulu kanye nezinsizakusebenza ocwaningweni nasekuthuthukisweni kwezindawo ezishisayo.
Isistimu ye-thermal yakhiwe ngezinto ezihlukahlukene zensimu yokushisa. Sizokwethula kafushane kuphela izinto ezisetshenziswa emkhakheni oshisayo. Ngokuqondene nokusatshalaliswa kwezinga lokushisa emkhakheni oshisayo kanye nomthelela wawo ekudonseni ikristalu, ngeke sikuhlaziye lapha. I-thermal field material ibhekisela esithandweni somlilo se-crystal ukukhula. Izingxenye zegumbi ezakhiwe futhi ezifakwe ngokushisa okushisayo, ezibalulekile ukuze kwakhiwe indwangu yokushisa efanele ezungeze i-semiconductor encibilika namakristalu.
eyodwa. izinto zokwakha zensimu eshisayo
Izinto eziyisisekelo ezisekelayo zokukhulisa i-silicon eyodwa ye-crystal ngendlela ye-Czochralski i-high-purity graphite. Izinto ze-graphite zidlala indima ebaluleke kakhulu embonini yesimanje. Ekulungiseni i-silicon eyodwa ye-crystal ngendlela ye-Czochralski, ingasetshenziswa njengezingxenye zesakhiwo sensimu eshisayo njengezifudumezi, amashubhu okuqondisayo, ama-crucibles, amashubhu okufakelwa, namathreyi aqoshiwe.
I-graphite impahla yakhethwa ngenxa yokulula kwayo ukulungiswa ngamavolumu amakhulu, ukucutshungulwa kanye nezakhiwo zokumelana nokushisa okuphezulu. Ikhabhoni esesimweni sedayimane noma igraphite inephuzu lokuncibilika eliphakeme kunanoma iyiphi i-elementi noma inhlanganisela. I-graphite impahla inamandla impela, ikakhulukazi emazingeni okushisa aphezulu, futhi ukuhanjiswa kwayo kagesi nokushisayo nakho kuhle impela. I-conductivity yayo kagesi iyenza ifaneleke njengezinto zokushisa, futhi ine-conductivity eyanelisayo yokushisa engakwazi ukusabalalisa ngokulinganayo ukushisa okukhiqizwa yi-heater ku-crucible nezinye izingxenye zensimu yokushisa. Kodwa-ke, emazingeni okushisa aphezulu, ikakhulukazi amabanga amade, indlela eyinhloko yokudlulisa ukushisa imisebe.
Izingxenye ze-graphite ekuqaleni zakhiwe ngokucindezela nge-extrusion noma i-isostatic yezinhlayiya ezinhle ze-carbonaceous ezixutshwe ne-binder. Izingxenye ze-graphite ezisezingeni eliphezulu zivame ukucindezelwa ngokwe-isostatically. Lonke ucezu kuqala lufakwe i-carbonized bese lufakwa i-graphitized emazingeni okushisa aphezulu kakhulu, asondele ku-3000°C. Izingxenye ezenziwe ngomshini ezivela kulawa ma-monoliths zivame ukuhlanzwa endaweni ene-chlorine emazingeni okushisa aphezulu ukuze kususwe ukungcoliswa kwensimbi ukuze kuhambisane nezidingo zemboni ye-semiconductor. Kodwa-ke, ngisho nokuhlanzwa okufanele, amazinga okungcoliswa kwensimbi angama-oda wobukhulu obuphezulu kunalokho okuvunyelwe yi-silicon single crystal materials. Ngakho-ke, ukunakekelwa kufanele kuthathwe ekwakhiweni kwensimu eshisayo ukuvimbela ukungcoliswa kwalezi zingxenye ekungeneni endaweni encibilikayo noma ekristalu.
Izinto ze-graphite ziyangeneka kancane, okuvumela insimbi esele ngaphakathi ukuthi ifinyelele kalula phezulu. Ngaphezu kwalokho, i-silicon monoxide ekhona kugesi yokuhlanza ezungeze indawo yegraphite ingangena ijule ezintweni eziningi futhi isabele.
Izifudumezi zokuqala ze-crystal silicon zomlilo zakhiwe ngezinsimbi eziphikisayo ezifana ne-tungsten ne-molybdenum. Njengoba ubuchwepheshe bokucubungula i-graphite buvuthwa, izakhiwo zikagesi zokuxhumanisa phakathi kwezingxenye ze-graphite ziyazinza, futhi izifudumezi zesithando somlilo esisodwa se-crystal silicon zithathele indawo ngokuphelele i-tungsten ne-molybdenum nezinye izifudumezi ezibonakalayo. Izinto ezisetshenziswa kakhulu zegraphite njengamanje i-isostatic graphite. i-semicera ingahlinzeka ngekhwalithi ephezulu ye-graphite ecindezelwe nge-isostatically.
Ku-Czochralski single crystal silicon furnaces, i-C/C composite materials ngezinye izikhathi isetshenziswa, futhi manje isisetshenziselwa ukwenza amabhawudi, amantongomane, ama-crucibles, amapuleti athwala imithwalo nezinye izinto. Izinto eziyinhlanganisela yekhabhoni/ikhabhoni (c/c) ziyizinto eziyinhlanganisela ye-carbon fibre eqiniswe ngekhabhoni. Zinamandla akhethekile aphezulu, i-modulus ethize ephezulu, i-coefficient ephansi yokwandisa ukushisa okushisayo, ukuguquguquka okuhle kukagesi, ukuqina okukhulu kokuphuka, amandla adonsela phansi akhethekile, ukumelana nokushaqeka okushisayo, ukumelana nokugqwala, Inochungechunge lwezakhiwo ezinhle kakhulu ezifana nokumelana nokushisa okuphezulu futhi okwamanje ibanzi. esetshenziswa ku-aerospace, umjaho, i-biomaterials nakweminye imikhakha njengohlobo olusha lwempahla yesakhiwo ekwazi ukumelana nokushisa okuphezulu. Njengamanje, ibhodlela eliyinhloko okuhlangatshezwana nalo yizinto zasekhaya eziyinhlanganisela ye-C/C yizinkinga zezindleko nezimboni.
Kukhona ezinye izinto eziningi ezisetshenziselwa ukudala izinkambu ezishisayo. I-graphite eqiniswe nge-carbon fibre inempahla yomshini engcono; nokho, kubiza kakhulu futhi kubeka ezinye izidingo zokuklama. I-Silicon carbide (SiC) iyimpahla engcono kune-graphite ngezindlela eziningi, kodwa ibiza kakhulu futhi kunzima ukwenza izingxenye zevolumu enkulu. Kodwa-ke, i-SiC ivame ukusetshenziswa njenge-CVD enamathela ukukhulisa impilo yezingxenye ze-graphite ezivezwe kugesi elinolaka le-silicon monoxide kanye nokunciphisa ukungcoliswa okuvela ku-graphite. I-CVD eminyene ye-silicon carbide coating ivimbela ngempumelelo ukungcola okungaphakathi kwe-microporous graphite material ukuthi ifinyelele phezulu.
Enye i-CVD carbon, engase futhi yakhe ungqimba oluminyene phezu kwezingxenye zegraphite. Ezinye izinto ezimelana nokushisa okuphezulu, njenge-molybdenum noma izinto ze-ceramic ezihambisana nemvelo, zingasetshenziswa lapho kungekho bungozi bokungcoliswa kokuncibilika. Kodwa-ke, izitsha zobumba ze-oxide zinokufaneleka okulinganiselwe ukuthintana ngokuqondile nezinto ze-graphite emazingeni okushisa aphezulu, ngokuvamile zishiya ezinye izindlela ezimbalwa uma ukufakwa kuyadingeka. Enye i-boron nitride eyi-hexagonal (ngezinye izikhathi ibizwa ngokuthi i-graphite emhlophe ngenxa yezakhiwo ezifanayo), kodwa inezakhiwo ezimbi zemishini. I-Molybdenum ngokuvamile inengqondo ekusetshenzisweni kokushisa okuphezulu ngenxa yezindleko zayo ezilinganiselwe, ukuhlukana okuphansi kwamakristalu e-silicon, kanye ne-coefficient ephansi yokuhlukanisa, mayelana ne-5 × 108, evumela ukungcoliswa kwe-molybdenum ngaphambi kokubhubhisa isakhiwo se-crystal.
ezimbili. Izinto zokufakelwa kwensimu eshisayo
I-insulation material esetshenziswa kakhulu yikhabhoni ezwakala ngezindlela ezahlukene. I-carbon feeling yenziwe ngemicu emincane esebenza njenge-thermal insulation ngoba ivimba imisebe eshisayo izikhathi eziningi ebangeni elifushane. Izwe elithambile lekhabhoni lilukwa libe amashidi ezinto ezincane kakhulu, abe esesikwa abe yisimo esifunekayo futhi agobe aqiniswe abe endaweni engaba lula. Umuzwa ophulukisiwe wakhiwe ngezinto zefayibha ezifanayo, kusetshenziswa i-carbon-containing binder ukuxhuma imicu ehlakazekile ibe into eqinile nesitayela. Ukusebenzisa i-chemical vapour deposition of carbon esikhundleni sezibophezelo kungathuthukisa izakhiwo zemishini zento.
Imvamisa, ingaphandle le-insulating yelashiwe lizwakala limbozwe nge-graphite coating noma i-foil ukunciphisa ukuguguleka nokuguga kanye nokungcoliswa kwezinhlayiya. Ezinye izinhlobo ze-carbon-based insulation materials nazo zikhona, njenge-carbon foam. Ngokuvamile, izinto ezenziwe nge-graphitized zikhethwa ngokucacile ngoba i-graphitization inciphisa kakhulu indawo engaphezulu ye-fiber. Lezi zinto ezisezingeni eliphezulu zivumela ukukhipha umoya kancane futhi kuthatha isikhathi esincane ukudonsa isithando somlilo endaweni ehlanzekile efanele. Olunye uhlobo i-C/C composite material, enezici ezivelele njengesisindo esilula, ukubekezelela umonakalo omkhulu, namandla aphezulu. Isetshenziswa emasimini ashisayo esikhundleni sezingxenye zegraphite, okunciphisa kakhulu imvamisa yokushintshwa kwezingxenye zegraphite futhi kuthuthukise ikhwalithi yekristalu eyodwa nokuzinza kokukhiqiza.
Ngokwesigaba sezinto zokusetshenziswa, i-carbon felt ingahlukaniswa ibe yi-polyacrylonitrile-based carbon felt, i-viscose-based carbon feeling, kanye ne-asphalt-based carbon feeling.
I-polyacrylonitrile-based carbon feeling inomlotha omningi, futhi ama-monofilaments aba brittle ngemva kokwelashwa kwezinga lokushisa eliphezulu. Ngesikhathi sokusebenza, uthuli lukhiqizwa kalula ukuze lungcolise imvelo yesithando somlilo. Ngesikhathi esifanayo, imicu ingena kalula ezimbotsheni zomuntu kanye namapheshana okuphefumula, okubangela ukulimala empilweni yomuntu; I-viscose-based carbon felt Inezici ezinhle zokuvala ukushisa, ithambile uma iqhathaniswa nokwelashwa kokushisa, futhi mancane amathuba okuthi ikhiqize uthuli. Kodwa-ke, ingxenye enqamulayo yezintambo ezisekelwe ku-viscose inomumo ongajwayelekile futhi kunemihosha eminingi endaweni yefayibha, okulula ukwakha lapho kukhona umoya we-oxidizing esithandweni somlilo sekristalu esisodwa se-Czochralski. Amagesi afana ne-CO2 abangela ukuna kwezakhi ze-oxygen ne-carbon ezintweni ze-silicon eyodwa zekristalu. Abakhiqizi abakhulu bahlanganisa i-SGL yaseJalimane nezinye izinkampani. Njengamanje, i-pitch-based carbon felt iyona esetshenziswa kakhulu embonini yekristalu eyodwa ye-semiconductor, futhi ukusebenza kwayo kokufakwa kwe-thermal kungcono kunokwezwakala kwekhabhoni enamathelayo. I-gum-based carbon ezwakalayo ingaphansi, kodwa i-asphalt-based carbon ezwakalayo inokuhlanzeka okuphezulu kanye nokukhipha uthuli oluphansi. Abakhiqizi bahlanganisa i-Kureha Chemical yaseJapan, i-Osaka Gas, njll.
Njengoba ukwakheka kwekhabhoni okuzwakalayo akulungisiwe, akulula ukusebenza. Manje izinkampani eziningi zenze into entsha yokufaka ukufudumala okusekelwe ku-carbon felt - ikhabhoni ephulukisiwe. Umuzwa wekhabhoni ophulukisiwe ubizwa nangokuthi ukuzwa okuqinile. Kuyikhabhoni ezwakalayo enomumo othile kanye nokuzinza kwayo ngemva kokukhulelwa nge-resin, laminated, solidified kanye ne-carbonized.
Izinga lokukhula le-silicon eyodwa ye-crystal lithintwa ngokuqondile imvelo yensimu eshisayo, futhi izinto zokufakwa kwe-carbon fiber zidlala indima ebalulekile kule ndawo. I-Carbon fibre thermal insulation soft izwakala isenenzuzo enkulu embonini ye-photovoltaic semiconductor ngenxa yezinzuzo zayo zezindleko, umphumela omuhle kakhulu wokushisa oshisayo, ukwakheka okuguquguqukayo kanye nokuma okwenziwa ngokwezifiso. Ngaphezu kwalokho, i-carbon fiber rigid insulation izwakele izoba nendawo enkulu yokuthuthuka emakethe yezinto ezishisayo ngenxa yamandla ayo athile nokusebenza okuphezulu. Sizibophezele ocwaningweni nasekuthuthukisweni emkhakheni wezinto zokufakelwa ezishisayo futhi siqhubeka nokwandisa ukusebenza komkhiqizo ukuze sikhuthaze ukuchuma nokuthuthukiswa kwemboni ye-photovoltaic semiconductor.
Isikhathi sokuthumela: May-15-2024