Indlela yokulungiselela izingxenye ezivamile ze-graphite eziboshwe nge-TaC

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Indlela ye-CVD (Chemical Vapor Deposition):
Ku-900-2300℃, kusetshenziswa i-TaCl₅kanye ne-CnHm njengemithombo ye-tantalum nekhabhoni, i-H₂ njengokunciphisa umoya, i-Ar₂as carrier gas, ifilimu yokusabela yokubeka. I-coating elungiselelwe i-compact, iyunifomu nokuhlanzeka okuphezulu. Kodwa-ke, kunezinkinga ezithile ezifana nenqubo eyinkimbinkimbi, izindleko ezibizayo, ukulawulwa kokugeleza komoya okunzima nokusebenza kahle kokubeka phansi.
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Indlela ye-slurry sintering:
I-slurry equkethe umthombo we-carbon, umthombo we-tantalum, i-disperant kanye ne-binder imbozwe ku-graphite futhi i-sintered ekushiseni okuphezulu ngemva kokoma. Ukugqoka okulungiselelwe kukhula ngaphandle kokuqondiswa okuvamile, kunezindleko eziphansi futhi kulungele ukukhiqizwa okukhulu. Kusasele ukuthi kuhlolwe ukuze kuzuzwe umfaniswano kanye nokunameka okugcwele ku-graphite enkulu, kuqede amaphutha okusekela kanye nokuthuthukisa amandla okubopha okunamathelayo.
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Indlela yokufafaza nge-Plasma:
I-TaC powder incibilikiswa yi-plasma arc ekushiseni okuphezulu, ifakwe i-athomu ibe amaconsi okushisa okuphezulu ngejethi enesivinini esikhulu, bese ifafazwa phezu kwe-graphite material. Kulula ukwenza ungqimba lwe-oxide ngaphansi kwe-non-vacuum, futhi ukusetshenziswa kwamandla kukhulu.

 

Umfanekiso . Ithreyi ye-wafer ngemva kokusetshenziswa kudivayisi ye-MOCVD ekhulile ye-GaN epitaxial (Veeco P75). Engakwesobunxele imbozwe nge-TaC kanti engakwesokudla imbozwe nge-SiC.

I-TaC ehlanganisiweizingxenye ze-graphite zidinga ukuxazululwa

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Amandla okubopha:
I-coefficient yokwandisa okushisayo nezinye izinto ezibonakalayo phakathi kwe-TaC nezinto zekhabhoni zihlukile, amandla okubopha okunamathelayo aphansi, kunzima ukugwema imifantu, izimbotshana nokucindezeleka okushisayo, futhi ukunamathela kulula ukuxebuka emkhathini wangempela oqukethe ukubola nokubola. inqubo yokukhuphuka nokupholisa okuphindaphindiwe.
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Ubumsulwa:
I-TaC coatingidinga ukuhlanzeka okuphezulu kakhulu ukuze kugwenywe ukungcola kanye nokungcola ngaphansi kwezimo zokushisa eziphezulu, futhi amazinga asebenzayo wokuqukethwe kanye namazinga okulinganisa ekhabhoni yamahhala kanye nokungcola okungaphakathi ngaphakathi nangaphakathi kwe-coating egcwele kudingeka kuvunyelwane.
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Ukuzinza:
Ukumelana nokushisa okuphezulu kanye nokumelana nomkhathi wamakhemikhali ngaphezu kuka-2300 ℃ yizinkomba ezibaluleke kakhulu zokuhlola ukuzinza kwento enamathelayo. Izimbobo, imifantu, amakhona angekho, kanye nemingcele yezinhlamvu zokuma ngakunye kulula ukubangela amagesi abolayo ukuthi angene futhi angene ku-graphite, okuholela ekuhlulekeni kokuvikela ukumboza.
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Ukumelana ne-oxidation:
I-TaC iqala ukwenza i-oxidize ku-Ta2O5 uma ingaphezu kuka-500 ℃, futhi izinga le-oxidation likhuphuka kakhulu ngokwanda kwezinga lokushisa nokugxila komoyampilo. I-oxidation yangaphezulu iqala kusukela emingceleni yokusanhlamvu kanye nezinhlamvu ezincane, futhi kancane kancane yenza amakristalu ekholomu namakristalu aphukile, okuholela enanini elikhulu lezikhala nezimbobo, futhi ukungena kwe-oksijini kuqinisa kuze kube yilapho uqweqwe lukhishwa. Ungqimba lwe-oxide oluvelayo lunokungahambi kahle kwe-thermal kanye nemibala ehlukahlukene ngokubukeka.
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Ukufana nobulukhuni:
Ukusatshalaliswa okungalingani kwendawo yokumboza kungaholela ekugxilweni kokucindezeleka okushisayo kwendawo, okwandisa ingozi yokuqhekeka nokuqhekeka. Ukwengeza, ubulukhuni obungaphezulu buthinta ngokuqondile ukusebenzisana phakathi kwento enamathelayo nendawo ezungezile yangaphandle, futhi ukubamadlana okuphezulu kakhulu kuholela kalula ekwandeni kokungqubuzana kwe-wafer kanye nenkundla yokushisa engalingani.
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Usayizi wokusanhlamvu:
Ubukhulu bokusanhlamvu obufanayo busiza ukuzinza kwe-coating. Uma ubukhulu bokusanhlamvu buncane, isibopho asiqinile, futhi kulula ukuba i-oxidized futhi igqwale, okuholela ekuqhekekeni kwenani elikhulu kanye nezimbobo emaphethelweni okusanhlamvu, okunciphisa ukusebenza kokuvikela kokugqoka. Uma ubukhulu bokusanhlamvu bukhulu kakhulu, bunzima kakhulu, futhi ukugqoka kulula ukugoqa ngaphansi kokucindezeleka okushisayo.