Ukusebenza Okuhle Kakhulu Kwezikebhe Ze-Silicon Carbide Wafer Ekukhuleni Kwe-Crystal

Izinqubo zokukhula kwekristalu zisenhliziyweni yokwenziwa kwe-semiconductor, lapho ukukhiqizwa kwamawafa ekhwalithi ephezulu kubalulekile. Ingxenye ebalulekile kulezi zinqubo yi-isikebhe esincanyana se-silicon carbide (SiC).. Izikebhe ze-SiC wafer zithole ukuqashelwa okubalulekile embonini ngenxa yokusebenza kwazo okukhethekile nokuthembeka. Kulesi sihloko, sizohlola izici eziphawulekayo zeIzikebhe ze-SiCkanye neqhaza labo ekusizeni ukukhula kwekristalu ekukhiqizeni ama-semiconductor.

Izikebhe ze-SiCaklanyelwe ngokukhethekile ukubamba nokuthutha amawafa e-semiconductor phakathi nezigaba ezihlukahlukene zokukhula kwekristalu. Njengempahla, i-silicon carbide inikeza inhlanganisela eyingqayizivele yezakhiwo ezifiselekayo ezenza kube ukukhetha okuhle kwezikebhe eziyisinkwa. Okokuqala nokubalulekile amandla ayo emishini evelele kanye nokuzinza kwezinga lokushisa eliphezulu. I-SiC inobulukhuni obuhle kakhulu nokuqina, okuyivumela ukuthi imelane nezimo ezimbi kakhulu ezihlangatshezwana nazo phakathi nezinqubo zokukhula kwekristalu.

Inzuzo eyodwa eyisihluthulelo yeIzikebhe ze-SiCi-thermal conductivity engavamile. Ukukhishwa kokushisa kuyisici esibalulekile ekukhuleni kwekristalu, njengoba kuthonya ukufana kwezinga lokushisa futhi kuvimbela ukucindezeleka okushisayo kuma-wafers. Ukushisa okuphezulu kwe-SiC kusiza ukudluliswa kokushisa okusebenzayo, kuqinisekise ukusatshalaliswa kwezinga lokushisa okungaguquki kuwo wonke amawafa. Lesi sici sizuzisa kakhulu ezinqubweni ezifana nokukhula kwe-epitaxial, lapho ukulawulwa okunembile kwezinga lokushisa kubalulekile ukuze kuzuzwe ukufakwa kwefilimu okufanayo.

Ngaphezu kwalokho,Izikebhe ze-SiCbonisa ukungabi namakhemikhali okuhle kakhulu. Ziyakwazi ukumelana nezinhlobonhlobo zamakhemikhali ezonakalisayo namagesi avame ukusetshenziswa ekukhiqizeni ama-semiconductor. Lokhu kuzinza kwamakhemikhali kuqinisekisa lokhoIzikebhe ze-SiCbalondoloze ubuqotho nokusebenza kwabo phezu kokuchayeka isikhathi eside ezindaweni zezinqubo ezinokhahlo. ukumelana nokuhlaselwa kwamakhemikhali kuvimbela ukungcoliswa kanye nokuwohloka kwezinto, kuvikela ikhwalithi yama-wafers akhuliswayo.

Ukuzinza kwe-Dimensional kwezikebhe ze-SiC wafer kungenye into ephawulekayo. Zenzelwe ukugcina isimo sazo kanye nesakhiwo ngisho nangaphansi kwamazinga okushisa aphezulu, ziqinisekisa ukuma okunembile kwama-wafers ngesikhathi sokukhula kwekristalu. Ukuzinza kohlangothi kunciphisa noma yikuphi ukuwohloka noma ukugoqa kwesikebhe, okungase kuholele ekungaqondisweni kahle noma ekukhuleni okungeyona into efanayo kuwo wonke amawafa. Lokhu kumisa okunembayo kubalulekile ukuze kuzuzwe umumo ofiswayo we-crystallographic kanye nokufana komphumela wempahla ye-semiconductor.

Izikebhe ze-SiC wafer nazo zinikeza izakhiwo zikagesi ezinhle kakhulu. I-Silicon carbide iyimpahla ye-semiconductor ngokwayo, ebonakala nge-bandgap ebanzi kanye ne-voltage ephezulu yokuphuka. Izakhiwo zikagesi zemvelo ze-SiC ziqinisekisa ukuvuza okuncane nokuphazamiseka kukagesi phakathi nezinqubo zokukhula kwekristalu. Lokhu kubaluleke kakhulu uma ukhulisa amadivayisi anamandla amakhulu noma usebenza ngezakhiwo zikagesi ezizwelayo, njengoba kusiza ukugcina ubuqotho bezinto ezisetshenziswayo zesemiconductor ezikhiqizwayo.

Ukwengeza, izikebhe ze-SiC wafer zaziwa ngokuphila isikhathi eside nokusetshenziswa kabusha. Zinesikhathi eside sokusebenza, ezinekhono lokubekezelela imijikelezo eminingi yokukhula kwekristalu ngaphandle kokuwohloka okukhulu. Lokhu kuqina kuhumushela ekusebenzeni kahle kwezindleko futhi kunciphisa isidingo sokushintshwa njalo. Ukusebenziseka kabusha kwezikebhe ze-SiC wafer akubambisi nje kuphela izinqubo ezisimeme zokukhiqiza kodwa futhi kuqinisekisa ukusebenza okungaguquki nokuthembeka ezinqubweni zokukhula kwekristalu.

Sengiphetha, izikebhe ze-SiC wafer seziyingxenye ebalulekile ekukhuleni kwekristalu ekukhiqizeni ama-semiconductor. Amandla abo okusebenza angavamile, ukuzinza kwezinga lokushisa eliphezulu, ukuguquguquka kokushisa, ukungangeni kwamakhemikhali, ukuqina kobukhulu, kanye nezakhiwo zikagesi kubenza bafiseleke kakhulu ekwenzeni lula izinqubo zokukhula kwekristalu. Izikebhe ze-SiC wafer ziqinisekisa ukusatshalaliswa kwezinga lokushisa okufanayo, zivimbele ukungcoliswa, futhi zinike amandla ukuma okuqondile kwama-wafers, ekugcineni kuholele ekukhiqizweni kwezinto ezisezingeni eliphezulu ze-semiconductor. Njengoba isidingo samadivayisi e-semiconductor athuthukile siqhubeka nokukhuphuka, ukubaluleka kwezikebhe ze-SiC wafer ekuzuzeni ukukhula kwekristalu okufanelekile akunakweqiwa.