I-SiC Paddle in Semiconductor Manufacturing

Emkhakheni wokukhiqizwa kwe-semiconductor, iI-SiC Paddleidlala indima ebalulekile, ikakhulukazi kunqubo yokukhula kwe-epitaxial. Njengengxenye eyinhloko esetshenziswe kuI-MOCVD(Metal Organic Chemical Vapor Deposition) izinhlelo,I-SiC Paddleszenzelwe ukubekezelela amazinga okushisa aphezulu kanye nezindawo ezinonya ngamakhemikhali, okuzenza zibaluleke kakhulu ekukhiqizeni okuthuthukile. Kwa-Semicera, sisebenza ngokukhethekile ekukhiqizeni ukusebenza okuphezuluI-SiC Paddlesyakhelwe kokubiliI-EpitaxyfuthiI-SiC Epitaxy, enikeza ukuqina okukhethekile nokuzinza kokushisa.

Ukusetshenziswa kwe-SiC Paddles kuvame ikakhulukazi ezinqubweni ezifana nokukhula kwe-epitaxial, lapho i-substrate idinga izimo eziqondile ezishisayo namakhemikhali. Imikhiqizo yethu ye-Semicera iqinisekisa ukusebenza okuphezulu ezindaweni ezidinga i-I-MOCVD Susceptor, lapho izingqimba ze-silicon carbide zekhwalithi ephezulu zifakwa kuma-substrates. Lokhu kunomthelela ekuthuthukisweniisilucwecwanaikhwalithi nokusebenza kahle okuphezulu kwedivayisi ekukhiqizweni kwe-semiconductor.

I-Semicera'sI-SiC Paddlesaziklanyelwe kuphelaI-Epitaxykodwa futhi yakhelwe uhla lwezinye izinhlelo zokusebenza ezibalulekile. Isibonelo, ahambisana ne-PSS Etching Carriers, ebalulekile ekukhiqizeni ama-wafers e-LED, futhiI-ICP Etching Abathwali, lapho ukulawulwa kwe-ion okunembayo kuyadingeka ekubumbeni ama-wafers. Lawa ma-paddles abalulekile kumasistimu afana nawoAbathwali be-RTP(I-Rapid Thermal Processing), lapho isidingo sokushintsha kwezinga lokushisa okusheshayo kanye ne-thermal conductivity ephezulu kubaluleke kakhulu.

Ukwengeza, ama-SiC Paddles asebenza njengama-LED Epitaxial Susceptors, asiza ukukhula kwama-wafers e-LED asebenza kahle kakhulu. Amandla okusingatha izingcindezi ezishisayo nezemvelo awenza aguquguquke kakhulu kuzo zonke izinqubo zokwenziwa kwe-semiconductor.

Sekukonke, i-Semicera izibophezele ekuletheni ama-SiC Paddles ahlangabezana nezidingo eziqondile zokukhiqiza i-semiconductor yesimanje. Kusukela ku-SiC Epitaxy kuya ku-MOCVD Susceptors, izixazululo zethu ziqinisekisa ukwethembeka nokusebenza okuthuthukisiwe, ukuhlinzeka ngezidingo ezisezingeni eliphezulu zemboni.