I-pyrolytic carbon coating high-purity hard feel ring

I-pyrolytic carbon coated high-purity hard feel ring Isithombe Esifakiwe

Incazelo emfushane:

I-Semicera's Pyrolytic Carbon Coated High-Purity Hard Felt Ring yakhelwe ukusebenza okuphezulu ezinhlelweni zokusebenza ze-semiconductor yezinga lokushisa eliphezulu. Le ngxenye ethuthukisiwe ifaka isisekelo esizwakalayo esiqinile esimbozwe nge-pyrolytic carbon, enikeza ukumelana nokugqokwa okuvelele, ukuzinza okushisayo, nokuqina kwamakhemikhali. Ilungele ukusetshenziswa ezindaweni ezidinga kakhulu, le ndandatho iqinisekisa ukusebenza okuthembekile nokusebenza kahle ezinqubweni ezidinga ukulawulwa okunembile kwezinga lokushisa nokuhlanzeka kwempahla.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-pyrolytic carbon coatingungqimba oluncane lwei-pyrolytic carbon coatedphezu kwe-isostatic ehlanzwe kakhului-graphite isebenzisa ubuchwepheshe be-chemical vapor deposition (CVD). Inokuminyana okuphezulu, ukuhlanzeka okuphezulu, kanye ne-anisotropicezishisayo, zikagesi, kazibuthe, kanye nemishini.

Izici eziyinhloko:

1. Ingaphezulu liminyene futhi alinawo ama-pores.

2. Ukuhlanzeka okuphezulu, okuqukethwe ukungcola okuphelele <20ppm,umoya omuhle.

3.Ukumelana nezinga lokushisa eliphezulu, amandla akhuphuka ngokunyuka kwezinga lokushisa lokusetshenziswa, afinyelele phezulu kakhuluinani ku-2750 ℃, i-sublimation ku-3600 ℃.

4.I-modulus ephansi enwebekayo, i-thermal conductivity ephezulu, i-coefficient ephansi yokwandisa ukushisa,kanye nokumelana nokushaqeka okuhle kakhulu kwe-thermal.

5.Ukuzinza okuhle kwamakhemikhali, ukumelana ne-asidi, i-alkali, usawoti, nama-organic reagents, futhi ineawukho umthelela ezinsimbini ezincibilikisiwe, i-slag, neminye imithombo yezindaba ebolayo. Ayifaki oxidizekakhulu emkhathini ngaphansi kwama-400 ℃, kanye nezinga le-oxidation kakhuluinyuka ngo-800 ℃.

6. Ngaphandle kokukhipha noma iyiphi igesi emazingeni okushisa aphezulu, ingagcina i-vacuum yeI-10-7mmHg cishe ngo-1800 ℃.