II-Quartz Glass Pedestalkusuka ku-Semicera yakhelwe ngokucophelela izinhlelo zokusebenza ezisebenza kahle kakhulu ekukhiqizeni ama-semiconductor kanye nezimboni ezihlobene. Kwenziwe kusukai-quartz ehlanzekile kakhulu, lesi sisekelo siqinisekisa ukuzinza okungavamile kokushisa kanye nokumelana okuhle kakhulu namakhemikhali, okusenza silungele izindawo ezidinga kakhulu.
Isisekelo sethu se-quartz sinikeza ukwesekwa okuthembekile phakathi nezinqubo ezibalulekile ezifana ne-LPCVD (Low-Pressure Chemical Vapor Deposition) kanye nokusabalalisaisilucwecwanainqubo. Ngekhwalithi yayo ephezulu, ingilazi ye-silica ehlanganisiwe esetshenziswa ekwakhiweni kwezisekelo zethu inciphisa ubungozi bokungcoliswa, iqinisekisa ubuqotho bemikhiqizo yakho.
Kwa-Semicera, sizimisele ukuhlinzeka ngemikhiqizo yekhwalithi ephezulu ehlangabezana nezindinganiso eziqinile zomkhakha. EyethuI-Quartz Glass Pedestalyakhelwe ukusekela izinqubo ezihlukahlukene ngempumelelo kuyilapho igcina ukuqina nokwethembeka. Noma ngabe okokucwaninga, ukuthuthukiswa, noma ukukhiqiza, lesi sisekelo siyingxenye ebalulekile yokuzuza imiphumela ephezulu emisebenzini yakho.
siyaqonda ukubaluleka kwezinto zekhwalithi emkhakheni we-semiconductor. Izingxenye zethu zengilazi ye-quartz ehlanganisiwe azigcini nje ngokuhlala isikhathi eside kodwa futhi zinenani lokuncintisana. I-quartz ehlanganisiwe esetshenziswa ezisekelweni zethu inikeza ukusebenza okuhle kakhulu, okwenza kube ukukhetha okuncanyelwayo kochwepheshe abafuna ukwethembeka ngaphandle kokuyekethisa ikhwalithi.
Izinzuzo ze-Fused Quartz Material
1.Ukumelana Nokushisa Okuphezulu
I-Fused Quartz Pedestal inendawo yokuthambisa ecishe ibe ngu-1730°C, eyivumela ukuthi imelane nokusetshenziswa isikhathi eside emazingeni okushisa asukela ku-1100°C kuya ku-1250°C. Ngaphezu kwalokho, ingakwazi ukubekezelela ukuchayeka isikhathi esifushane emazingeni okushisa afinyelela ku-1450°C.
2.Ukumelana Nokugqwala
I-Fused Quartz Pedestal ayisebenzi ngamakhemikhali kuma-acid amaningi, ngaphandle kwe-hydrofluoric acid. Ukumelana kwayo ne-asidi kudlula okwebumba izikhathi ezingu-30 nensimbi engagqwali izikhathi ezingu-150. Emazingeni okushisa aphakeme, ayikho enye into engafanelana nokuzinza kwamakhemikhali e-quartz ehlanganisiwe, okuyenza ibe ukukhetha okuhle ezindaweni zamakhemikhali ezinokhahlo.
3. Ukuzinza Okushisayo
Esinye sezici ezivelele ze-Fused Quartz Pedestal i-coefficient yayo encane yokwandisa okushisayo. Lesi sakhiwo siyivumela ukuthi imelane nokushintsha kwezinga lokushisa okunzima ngaphandle kokuqhekeka. Isibonelo, ingashiswa ngokushesha ku-1100 ° C bese icwiliswa emanzini ekamelweni lokushisa ngaphandle kokulondoloza umonakalo-isici esibalulekile sezinqubo zokukhiqiza ezicindezela kakhulu.
