Incazelo
I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD
I-heater ye-graphite:
Izingxenye ze-graphite heater zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelele ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi ekhishwe futhi ifakwe.
Izici eziyinhloko ze-graphite heater
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.
I-Chemical Graphite
Inzuzo:Ukumelana nezinga lokushisa eliphezulu
Isicelo:MOCVD/Vacuum furnace/Hot Zone
Ukuminyana ngobuningi:1.68-1.91g/cm3
Amandla e-Flexural: 30-46Mpa
Ukumelana: 7-12μΩm
Imingcele eyinhloko ye-graphite heater
Ukucaciswa Kwezobuchwepheshe | I-VET-M3 |
Ukuminyana kwenqwaba (g/cm3) | ≥1.85 |
Okuqukethwe komlotha (PPM) | ≤500 |
Ukuqina Kwasogwini | ≥45 |
Ukumelana Okuqondile (μ.Ω.m) | ≤12 |
Amandla e-Flexural (Mpa) | ≥40 |
Amandla Acindezelayo (Mpa) | ≥70 |
Ubukhulu. Usayizi Wokusanhlamvu (μm) | ≤43 |
I-Coefficient of Thermal Expansion Mm/°C | ≤4.4*10-6 |
I-Graphite heater yesithando somlilo kagesi inezindawo zokumelana nokushisa, ukumelana ne-oxidation, ukuhamba kahle kukagesi kanye namandla angcono wemishini. Singakwazi umshini izinhlobo ezihlukahlukene ze-graphite heater ngokwemiklamo yamakhasimende.
Iphrofayela Yenkampani
I-WeiTai Energy Technology Co., Ltd. ingumhlinzeki oholayo wezitsha zobumba ezithuthukisiwe ze-semiconductor futhi okuwukuphela komkhiqizi e-China ongahlinzeka ngasikhathi sinye ukuhlanzeka okuphezulu kwe-silicon carbide ceramic (ikakhulukazi i-Recrystallized SiC) kanye ne-CVD SiC coating. Ngaphezu kwalokho, inkampani yethu izibophezele nasezindaweni zobumba ezifana ne-alumina, i-aluminium nitride, i-zirconia, ne-silicon nitride, njll.
Imikhiqizo yethu eyinhloko ihlanganisa: i-silicon carbide etching disc, i-silicon carbide boat tow, isikebhe se-silicon carbide wafer (Photovoltaic&Semiconductor), ishubhu le-silicon carbide furnace, i-silicon carbide cantilever paddle, i-silicon carbide chucks, i-silicon carbide beam, kanye ne-CVD SiC coating kanye ne-TaC enamathela. Imikhiqizo esetshenziswa kakhulu ezimbonini ze-semiconductor kanye ne-photovoltaic, njengemishini yokukhula kwekristalu, i-epitaxy, i-etching, ukupakisha, i-coating ne-diffusion furnaces, njll.
Inkampani yethu inemishini ephelele yokukhiqiza efana nokubumba, i-sintering, ukucubungula, imishini yokumboza, njll., engaqedela zonke izixhumanisi ezidingekayo zokukhiqizwa komkhiqizo futhi ibe nokulawulwa okuphezulu kwekhwalithi yomkhiqizo; Uhlelo oluhle kakhulu lokukhiqiza lungakhethwa ngokuya ngezidingo zomkhiqizo, okuholela ezindleko eziphansi kanye nokuhlinzeka amakhasimende ngemikhiqizo yokuncintisana kakhulu; Singakwazi ukuhlela ukukhiqizwa ngendlela eguquguqukayo nangempumelelo ngokusekelwe kuzidingo zokulethwa kwe-oda futhi ngokuhambisana nezinhlelo zokuphatha ama-oda aku-inthanethi, sinikeze amakhasimende isikhathi sokulethwa esisheshayo nesiqinisekisiwe.