I-SiC Coating Graphite Wafer Susceptor

Incazelo emfushane:

I-Semicera Semiconductor's SiC Coating Graphite Wafer Susceptor iletha ukusebenza okushisayo okuphezulu nokuqina kokucutshungulwa kwe-wafer. Thembela ku-Semicera ukuze uthole izinto ezithuthukisiwe ezihlanganiswe ne-SiC eziklanyelwe ukuthuthukisa ukusebenza kahle nokuthembeka ezinhlelweni zokusebenza ze-semiconductor.

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Incazelo

Ama-SiC Wafer Susceptors we-Semicorex we-MOCVD (Metal-Organic Chemical Vapor Deposition) akhiwe ukuze ahlangabezane nezidingo eziqondile zezinqubo zokubeka i-epitaxial. Isebenzisa i-Silicon Carbide (SiC) yekhwalithi ephezulu, lezi susceptors zinikeza ukuqina nokusebenza okungenakuqhathaniswa endaweni enezinga lokushisa eliphezulu negqwala, iqinisekisa ukukhula okunembayo nokusebenza kahle kwezinto zokwakha ze-semiconductor.

Izici Eziyinhloko:

1. Superior Material PropertiesYakhiwe nge-SiC yezinga eliphezulu, ama-wafer susceptivity ethu abonisa ukusebenza kahle okushisayo nokumelana namakhemikhali. Lezi zakhiwo zibenza bakwazi ukumelana nezimo ezimbi kakhulu zezinqubo ze-MOCVD, okuhlanganisa izinga lokushisa eliphezulu namagesi abolayo, okuqinisekisa ukuphila isikhathi eside nokusebenza okuthembekile.

2. Ukunemba ku-Epitaxial DepositionUbunjiniyela obunembile be-SiC Wafer Susceptors yethu buqinisekisa ukusatshalaliswa kwezinga lokushisa okufanayo endaweni yonke eyiwafa, kwenze kube lula ukukhula kongqimba lwe-epitaxial olungaguquki kanye nekhwalithi ephezulu. Lokhu kunemba kubalulekile ekukhiqizeni ama-semiconductors anezakhiwo zikagesi ezifanele.

3. Ukuqina OkuthuthukisiweIzinto eziqinile ze-SiC zinikeza ukumelana okuhle kakhulu ekugqokeni nasekucekeleni phansi, ngisho nangaphansi kokuchayeka okuqhubekayo ezindaweni zenqubo ezinzima. Lokhu kuqina kunciphisa imvamisa yokushintshwa kwe-susceptor, kunciphisa isikhathi sokuphumula kanye nezindleko zokusebenza.