I-SiC Crystal Growth Tubes ene-Advanced Tantalum Carbide Coating

Incazelo emfushane:

I-coating inokuhlanzeka okuphezulu, ukumelana nokushisa okuphezulu, nokumelana namakhemikhali ukuze kuvikeleke ngempumelelo izindawo ze-graphite ekugugeni, ukugqwala, kanye ne-oxidation. I-Tantalum carbide coating iwubuchwepheshe obusebenza kahle bokumboza phezulu obuhlinzeka ngokuthuthukiswa okuphakeme kokusebenza ngokwakha ungqimba oluvikelayo olungagugi, olumelana nokugqwala ebusweni bento.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Semicera Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN nezingqimba ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.

Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.

Ukusebenza kahle okuphezulu kwe-tantalum carbide coating_ kuthuthukisa ukusebenza kahle kokukhiqizwa kwezimboni futhi kunciphise izindleko zokulungisa Isithombe esifakiwe

Ingxenye ye-Tac yokukhula kwekristalu eyodwa

I-Antiwear tantalum carbide coating_ Ivikela okokusebenza ekugugeni nasekugqwaleni Isithombe Esifakiwe

I-graphite enendandatho eboshwe yi-TaC

nge-TaC nangaphandle kwayo

Ngemva kokusebenzisa i-TaC (kwesokudla)

Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu: