Solid SiC Focus Ring

Indandatho Eqinile ye-SiC Focus Isithombe Esifakiwe

Incazelo emfushane:

Izindandatho ze-SiC Etch ze-Semicera ziklanyelwe izinhlelo zokusebenza zokunamathisela ze-semiconductor ezisebenza kahle ngokuhlala isikhathi eside nokunemba. Yenziwe nge-high-purity silicon carbide (SiC), le ndandatho ye-etch ihamba kahle kakhulu ekufakweni kwe-plasma, etching okomile, nezinqubo zokunamathisela i-wafer. Inqubo yokukhiqiza ethuthukisiwe ye-Semicera iqinisekisa ukuthi le ndandatho inikeza ukumelana nokugqokwa okuhle kakhulu kanye nokuzinza kokushisa ngisho nasezimweni ezinzima kakhulu. Sibheke ngabomvu ukuba uzakwethu wesikhathi eside e-China.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Solid SiC Focus Ring evela ku-Semicera iyingxenye esezingeni eliphezulu eklanyelwe ukuhlangabezana nezidingo zokukhiqiza okuthuthukisiwe kwe-semiconductor. Kwenziwe ngobumsulwa obuphezuluI-Silicon Carbide (SiC), le ndandatho yokugxila ilungele uhla olubanzi lwezinhlelo zokusebenza embonini ye-semiconductor, ikakhulukazi kuIzinqubo ze-CVD SiCukufakwa kwe-plasma, njllI-ICPI-RIE (I-Inductively Coupled Plasma Reactive Ion Etching). Yaziwa ngokumelana kwayo okukhethekile nokugqoka, ukuzinza okuphezulu kokushisa, nokuhlanzeka, iqinisekisa ukusebenza okuhlala isikhathi eside ezindaweni ezinokucindezeleka okuphezulu.

Ku-semiconductorisilucwecwanaukucutshungulwa, Izindandatho ze-Solid SiC Focus zibalulekile ekugcineni i-etching enembile ngesikhathi sokufakwa okomile kanye nezinhlelo zokusebenza ze-wafer etching. Indandatho yokugxila ye-SiC isiza ekugxiliseni i-plasma phakathi nezinqubo ezifana nokusebenza komshini we-plasma etching, iyenze ibe semqoka ekufakweni kwamawafa e-silicon. Izinto eziqinile ze-SiC zinikeza ukumelana okungenakuqhathaniswa ekugugulekeni, kuqinisekisa ukuphila isikhathi eside kwemishini yakho futhi kuncishiswe isikhathi sokuphumula, okubalulekile ekugcineni amandla okusebenza aphezulu ekwenziweni kwe-semiconductor.

I-Solid SiC Focus Ring evela ku-Semicera yakhelwe ukuthi imelane nezinga lokushisa elidlulele kanye namakhemikhali anolaka avame ukutholakala embonini ye-semiconductor. Yenzelwe ngokukhethekile ukusetshenziswa emisebenzini enembayo ephezulu njengeI-CVD SiC coatings, lapho ukuhlanzeka nokuqina kubaluleke kakhulu. Ngokumelana okuhle kakhulu nokushaqeka okushisayo, lo mkhiqizo uqinisekisa ukusebenza okungaguquki nokuzinzile ngaphansi kwezimo ezinzima kakhulu, okuhlanganisa ukuchayeka emazingeni okushisa aphezulu ngesikhathiisilucwecwanaetching izinqubo.

Kuzinhlelo zokusebenza ze-semiconductor, lapho ukunemba nokuthembeka kubalulekile, i-Solid SiC Focus Ring idlala indima ebalulekile ekuthuthukiseni ukusebenza kahle okuphelele kwezinqubo zokuqopha. Idizayini yayo eqinile, esebenza kahle kakhulu iyenza ibe ukukhetha okuphelele ezimbonini ezidinga izingxenye ezihlanzekile ezisebenza ngaphansi kwezimo ezibucayi. Ukuthi isetshenziswe kuCVD SiC indandathoizinhlelo zokusebenza noma njengengxenye yenqubo yokuhlanganisa i-plasma, i-Solid SiC Focus Ring ye-Semicera isiza ukuthuthukisa ukusebenza kwemishini yakho, inikeze ukuphila isikhathi eside nokwethembeka isidingo sezinqubo zakho zokukhiqiza.

Izici Eziyinhloko:

• Ukumelana nokugqoka okuphezulu kanye nokuzinza okuphezulu kokushisa
• Impahla ye-High-purity Solid SiC yempilo enwetshiwe
• Ilungele ukushumeka kwe-plasma, i-ICP RIE, kanye nezinhlelo zokusebenza zokunamathisela ezomile
• Iphelele ekufakweni kwe-wafer, ikakhulukazi kuzinqubo ze-CVD SiC
• Ukusebenza okuthembekile ezindaweni ezibucayi kanye namazinga okushisa aphezulu
• Iqinisekisa ukunemba nokusebenza kahle ekucushweni kwamawafa e-silicon

Izicelo:

• Izinqubo ze-CVD SiC ekukhiqizeni ama-semiconductor
• I-Plasma etching kanye nezinhlelo ze-ICP RIE
• Izinqubo zokucwilisa okomile kanye ne-wafer etching
• I-etching kanye nokufakwa emshinini wokufaka i-plasma
• Izingxenye zokunemba zamasongo amawafer namaringi e-CVD SiC