Izindandatho eziqinile ze-CVD SiCasetshenziswa kakhulu emikhakheni yezimboni neyesayensi emazingeni okushisa aphezulu, ezindaweni ezonakalisayo nezilimazayo. Idlala indima ebalulekile ezindaweni eziningi zohlelo lokusebenza, okuhlanganisa:
1. Ukukhiqizwa kwe-semiconductor:Izindandatho eziqinile ze-CVD SiCingasetshenziselwa ukushisa nokupholisa imishini ye-semiconductor, inikeze ukulawula okuzinzile kokushisa ukuze kuqinisekiswe ukunemba nokuvumelana kwenqubo.
2. I-Optoelectronics: Ngenxa yokuguquguquka kwayo okuhle kakhulu kokushisa nokumelana nokushisa okuphezulu,Izindandatho eziqinile ze-CVD SiCingasetshenziswa njengezinto zokusekela nezokukhipha ukushisa zama-lasers, imishini yokuxhumana ye-fiber optic kanye nezingxenye ze-optical.
3. Imishini enembayo: Izindandatho eziqinile ze-CVD SiC zingasetshenziselwa ukunemba amathuluzi nezinto zokusebenza endaweni yokushisa ephezulu nezimo ezonakalisayo, njengeziko lokushisa eliphezulu, izisetshenziswa zevacuum nama-reactor amakhemikhali.
4. Imboni yamakhemikhali: Izindandatho eziqinile ze-CVD SiC zingasetshenziswa ezitsheni, amapayipi nama-reactors ekuphenduleni kwamakhemikhali kanye nezinqubo ze-catalytic ngenxa yokumelana nokugqwala nokuzinza kwamakhemikhali.
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I-Epitaxy Growth Susceptor
Amawafa e-silicon/silicon carbide adinga ukudlula ezinqubweni eziningi okufanele asetshenziswe kumishini kagesi. Inqubo ebalulekile i-silicon/sic epitaxy, lapho amawafa e-silicon/sic athwalwa khona ngesisekelo segraphite. Izinzuzo ezikhethekile ze-Semicera's silicone carbide-coated graphite base zifaka ukuhlanzeka okuphezulu kakhulu, ukunamathela okufanayo, nempilo yesevisi ende kakhulu. Futhi banokuphikiswa okuphezulu kwamakhemikhali kanye nokuzinza kokushisa.
Ukukhiqizwa kwe-chip ye-LED
Ngesikhathi sokumbozwa okubanzi kwe-reactor ye-MOCVD, isisekelo seplanethi noma umthwali uhambisa i-wafer ye-substrate. Ukusebenza kwezinto eziyisisekelo kunethonya elikhulu kwikhwalithi yokugqoka, okubuye kuthinte izinga le-scrap ye-chip. Isisekelo esihlanganiswe ne-silicon carbide se-Semicera sinyusa ukusebenza kahle kokukhiqizwa kwamawafa e-LED ekhwalithi ephezulu futhi sinciphisa ukuchezuka kwamaza. Siphinde sinikeze izingxenye ezengeziwe ze-graphite zazo zonke iziphehlisi ze-MOCVD ezisetshenziswayo njengamanje. Singakwazi ukugqoka cishe noma iyiphi ingxenye nge-silicon carbide coating, noma ngabe ububanzi bengxenye bufika ku-1.5M, sisengakwazi ukugqoka nge-silicon carbide.
Inkambu yeSemiconductor, Inqubo Yokusabalalisa Kwe-oxidation, njll.
Enqubweni ye-semiconductor, inqubo yokunwetshwa kwe-oxidation idinga ukuhlanzeka okuphezulu komkhiqizo, futhi kwa-Semicera sinikeza inkambiso nezinsizakalo zokumboza ze-CVD zeningi lezingxenye ze-silicon carbide.
Isithombe esilandelayo sibonisa udaka lwe-silicon carbide olucutshungulwe kahle lwe-Semicea kanye neshubhu le-silicon carbide furnace elihlanzwa ku-1000-izingaengenalo uthuliigumbi. Abasebenzi bethu basebenza ngaphambi kokugqoka. Ukuhlanzeka kwe-silicon carbide yethu kungafinyelela ku-99.99%, futhi ubumsulwa be-sic coating bukhulu kuno-99.99995%.