I-TaC Coated Deep UV LED MOCVD Graphite Susceptor

Incazelo emfushane:

I-TaC Coated Deep UV LED MOCVD Graphite Susceptor ye-Semicera yakhelwe ukusebenza okuphakeme ezinhlelweni zokusebenza ze-MOCVD epitaxy. Ikhiqizwe e-China, inikeza ukuqina okuthuthukisiwe kanye nokumelana nezinga lokushisa okuphezulu, okuyenza ilungele izimo ezinzima. Ubuchwepheshe bokunamathela obuphambili be-Semicera buqinisekisa ukusebenza okuthembekile nokusebenza kahle, okusekela ukukhiqizwa kwe-Deep UV LED yekhwalithi ephezulu.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-TaC ehlanganisiweisisekelo esijulile se-ultraviolet LED graphite sibhekisela enqubweni yokuthuthukisa ukusebenza nokuzinza kwedivayisi ngokufaka aI-TaC coatingesisekelweni segraphite ngesikhathi sokulungiswa kwedivayisi ejulile ye-ultraviolet LED. Lokhu kufakwa kungathuthukisa ukusebenza kokukhipha ukushisa, ukumelana nokushisa okuphezulu nokumelana ne-oxidation yedivayisi, ngaleyo ndlela kuthuthukise ukusebenza kahle nokuthembeka kwedivayisi ye-LED. Amadivaysi e-LED e-ultraviolet ejulile avame ukusetshenziswa kwezinye izinkambu ezikhethekile, njengokubulala amagciwane, ukuphulukisa ukukhanya, njll., anezidingo eziphezulu zokuzinza nokusebenza kwedivayisi. Ukusetshenziswa kweI-TaC ehlanganiswe ne-graphiteisisekelo singathuthukisa ngempumelelo ukuqina nokusebenza kwedivayisi, sinikeze ukwesekwa okubalulekile ekuthuthukisweni kobuchwepheshe obujulile be-ultraviolet LED.

I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.

Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.

Ukusebenza kahle okuphezulu kwe-tantalum carbide coating_ kuthuthukisa ukusebenza kahle kokukhiqizwa kwezimboni futhi kunciphise izindleko zokulungisa Isithombe esifakiwe

Ingxenye ye-Tac yokukhula kwekristalu eyodwa

I-Antiwear tantalum carbide coating_ Ivikela okokusebenza ekugugeni nasekugqwaleni Isithombe Esifakiwe

I-graphite enendandatho eboshwe yi-TaC

nge-TaC nangaphandle kwayo

Ngemva kokusebenzisa i-TaC (kwesokudla)

Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu: