I-TaC emboze izithwali ze-epitaxial waferzivame ukusetshenziswa ekulungiseleleni amadivaysi e-optoelectronic asebenza kahle kakhulu, amadivaysi kagesi, izinzwa neminye imikhakha. LokhuI-epitaxial wafer carrieribhekisela ekubekweni kweI-TaCifilimu elincanyana ku-substrate phakathi nenqubo yokukhula kwekristalu ukuze kwakheke iwafa enesakhiwo esithile kanye nokusebenza kokulungiswa kwedivayisi okulandelayo.
Ubuchwepheshe be-Chemical vapor deposition (CVD) buvame ukusetshenziselwa ukulungiselelaI-TaC emboze izithwali ze-epitaxial wafer. Ngokuphendula izandulela zensimbi eziphilayo namagesi omthombo wekhabhoni ezingeni lokushisa eliphezulu, ifilimu ye-TaC ingafakwa phezu kwe-crystal substrate. Le filimu ingaba nezakhiwo ezinhle kakhulu zikagesi, optical kanye nemishini futhi ifanele ukulungiswa kwemishini ehlukahlukene yokusebenza okuphezulu.
I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.
Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.
nge-TaC nangaphandle kwayo
Ngemva kokusebenzisa i-TaC (kwesokudla)
Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu:
