I-TaC Coted MOCVD Graphite Susceptor

Incazelo emfushane:

I-TaC Coated MOCVD Graphite Susceptor ye-Semicera yakhelwe ukuqina okuphezulu nokumelana nezinga lokushisa okuphezulu okukhethekile, okuyenza ifanelekele izinhlelo zokusebenza ze-MOCVD epitaxy. Lesi sici sithuthukisa ukusebenza kahle nekhwalithi ekukhiqizweni kwe-Deep UV LED. Ikhiqizwe ngokunemba, i-Semicera iqinisekisa ukusebenza okuphezulu nokuthembeka kuyo yonke imikhiqizo.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-TaC coatingiwuphawu lwento ebalulekile, evame ukulungiswa phezu kwesisekelo segraphite ngobuchwepheshe bensimbi be-organic chemical vapor deposition (MOCVD). Lokhu kunamathela kunezinto ezinhle kakhulu, njengokuqina okuphezulu, ukumelana okuhle kakhulu kokugqoka, ukumelana nokushisa okuphezulu nokuzinza kwamakhemikhali, futhi kufanelekile ezinhlelweni ezihlukahlukene zobunjiniyela ezifunwa kakhulu.

Ubuchwepheshe be-MOCVD ubuchwepheshe obusetshenziswa kakhulu bokukhula kwefilimu elincanyana obufaka ifilimu ehlanganisiwe efiselekayo endaweni engaphansi ngokuphendula izandulela zensimbi ezinamagesi asebenzayo emazingeni okushisa aphezulu. Lapho ulungiselelaI-TaC coating, ukukhetha izandulela zensimbi ezifanele zemvelo kanye nemithombo yekhabhoni, ukulawula izimo zokusabela kanye nemingcele yokubeka, ifilimu ye-TaC emfaniswano neminyene ingafakwa kusisekelo segraphite.

I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.

Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.

Ukusebenza kahle okuphezulu kwe-tantalum carbide coating_ kuthuthukisa ukusebenza kahle kokukhiqizwa kwezimboni futhi kunciphise izindleko zokulungisa Isithombe esifakiwe

Ingxenye ye-Tac yokukhula kwekristalu eyodwa

I-Antiwear tantalum carbide coating_ Ivikela okokusebenza ekugugeni nasekugqwaleni Isithombe Esifakiwe

I-graphite enendandatho eboshwe yi-TaC

nge-TaC nangaphandle kwayo

Ngemva kokusebenzisa i-TaC (kwesokudla)

Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu: