I-Tantalum Carbid Coating Half-moon

I-Tantalum Carbid Coating Isithombe Esifakiwe Half-moon

Incazelo emfushane:

Ngokufika kwama-wafers angu-8-inch silicon carbide (SiC), izidingo zezinqubo ezihlukahlukene ze-semiconductor ziye zaqina kakhulu, ikakhulukazi ezinqubweni ze-epitaxy lapho amazinga okushisa angadlula ama-degree Celsius angu-2000. Izinto zendabuko ezibamba ukushisa, njenge-graphite eboshwe nge-silicon carbide, zivamise ukuzithoba kulawa mazinga okushisa aphezulu, ziphazamise inqubo ye-epitaxy. Kodwa-ke, i-CVD tantalum carbide (TaC) ibhekana ngempumelelo nalolu daba, imelana namazinga okushisa afika ku-2300 degrees Celsius futhi inikeza impilo yesevisi ende. Xhumana ne-Semicera's I-Tantalum Carbid Coating Half-moonukuze uhlole kabanzi mayelana nezixazululo zethu ezithuthukile.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.

Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.

Ukusebenza kahle okuphezulu kwe-tantalum carbide coating_ kuthuthukisa ukusebenza kahle kokukhiqizwa kwezimboni futhi kunciphise izindleko zokulungisa Isithombe esifakiwe

Ingxenye ye-Tac yokukhula kwekristalu eyodwa

I-Antiwear tantalum carbide coating_ Ivikela okokusebenza ekugugeni nasekugqwaleni Isithombe Esifakiwe

I-graphite enendandatho eboshwe yi-TaC

nge-TaC nangaphandle kwayo

Ngemva kokusebenzisa i-TaC (kwesokudla)

Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu: