I-TaC Coated Plate icwecwe elikhethekile elakhelwe ukusetshenziswa ezinqubweni ze-SiC epitaxial, elakhiwe ngokunemba ngezinto ezisezingeni eliphezulu zegraphite. Ingaphezulu layo limbozwe ngobunono nge-tantalum carbide (TaC), inhlanganisela eyaziwa ngobumsulwa namandla ayo akhethekile. I-TaC enamathelayo ithuthukisa ukuqina kwepuleti kanye nokumelana namazinga okushisa aphezulu, iyenze ilungele izimo ezinzima zezinqubo ze-SiC epitaxial.
Le TaC Coated Plate emisha iyidiski eyisipesheli eklanyelwe ukusetshenziswa ezinqubweni ze-SiC epitaxial, eklanywe ngokunembayo ngezinto ezisezingeni eliphezulu zegraphite. Ingaphezulu le-TaC Coated Plate lihuqwe ngobunono nge-tantalum carbide (TaC), inhlanganisela eyaziwa ngobumsulwa namandla ayo akhethekile. isebenza njengenkundla ethembekile yokuthwala ama-wafers phakathi nezigaba ezahlukahlukene zokukhula kwe-SiC epitaxial. Isisekelo sayo se-graphite esihlanzekile sinikeza indawo ezinzile futhi engasebenzi, kuyilapho ukunamathela kwe-TaC kwengeza ungqimba olwengeziwe lwesivikelo ekuphenduleni kwamakhemikhali nokuguga.
I-SemicinkathiI-TaC Coated Plate yenziwe ngendlela oyifisayo ngokwezidingo ezithile zamakhasimende, iqinisekisa ukusebenza kahle nokuhambisana nezinhlelo zabo ze-SiC epitaxial. Noma ngabe usayizi, umumo, noma okunye ukucaciswa, lawa mapuleti enzelwe ukuhlangabezana nezidingo ezihlukile zazo zonke izinhlelo zokusebenza.
nge-TaC nangaphandle kwayo
Ngemva kokusebenzisa i-TaC (kwesokudla)
Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu:
