I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.
I-Tantalum carbide coated wafer carriers isetshenziswa kabanzi ekucubunguleni i-wafer kanye nezinqubo zokuphatha ezinqubweni zokukhiqiza ze-semiconductor. Banikeza ukwesekwa okuzinzile nokuvikelwa ukuze kuqinisekiswe ukuphepha, ukunemba nokuvumelana kwama-wafers ngesikhathi senqubo yokukhiqiza. I-Tantalum carbide coating inganweba impilo yesevisi yenkampani yenethiwekhi, inciphise izindleko, futhi ithuthukise ikhwalithi nokuthembeka kwemikhiqizo ye-semiconductor.
Incazelo ye-tantalum carbide coated wafer carrier imi kanje:
1. Ukukhethwa kwezinto ezibonakalayo: I-Tantalum carbide iyinto esebenza kahle kakhulu, ubulukhuni obuphezulu, indawo ephakeme yokuncibilika, ukumelana nokugqwala kanye nezakhiwo ezinhle kakhulu zemishini, ngakho-ke isetshenziswa kabanzi kwinqubo yokukhiqiza i-semiconductor.
2. I-Surface coating: I-Tantalum carbide coating isetshenziswa ebusweni be-wafer carrier ngokusebenzisa inqubo ekhethekile yokuhlanganisa ukuze kwakhiwe umfaniswano kanye ne-tantalum carbide eminyene. Lokhu kufakwa kunganikeza ukuvikeleka okwengeziwe nokumelana nokugqoka, kuyilapho kune-conductivity enhle yokushisa.
3. Ukucaba nokunemba: I-Tantalum carbide coated wafer carrier inezinga eliphezulu lokucaba nokunemba, iqinisekisa ukusimama nokunemba kwamawafa phakathi nenqubo yokukhiqiza. Ukucaba nokuqedwa kwendawo yenkampani yenethiwekhi kubalulekile ukuze kuqinisekiswe ikhwalithi nokusebenza kwe-wafer.
4. Ukuqina kwezinga lokushisa: Abathwali be-wafer be-Tantalum carbide bangakwazi ukugcina ukuzinza ezindaweni ezishisa kakhulu ngaphandle kokuguqulwa noma ukuxegiswa, ukuqinisekisa ukuzinza nokuvumelana kwama-wafers ezinqubweni zokushisa okuphezulu.
5. Ukumelana nokugqwala: Izingubo ze-Tantalum carbide zinokumelana nokugqwala okuhle kakhulu, zingamelana nokuguguleka kwamakhemikhali nezinyibilikisi, futhi zivikele ophethe ekugqwaleni okuwuketshezi negesi.
nge-TaC nangaphandle kwayo
Ngemva kokusebenzisa i-TaC (kwesokudla)
Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu:
