Ishidi le-graphite eline-Tantalum carbidekuyinto graphite impahla nge ungqimba elincanyanai-tantalum carbidephezu kwe-substrate. Ungqimba oluncane lwe-tantalum carbide luvamise ukwakhiwa phezu kwe-graphite substrate ngamasu anjengokufakwa komhwamuko obonakalayo (PVD) noma i-chemical vapor deposition (CVD). Lokhu kunamathela kunezakhiwo ezinhle kakhulu njengokuqina okuphezulu, ukumelana okuhle kakhulu kokugqoka, ukumelana nokugqwala kanye nokuzinza okuphezulu kwezinga lokushisa.
I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.
Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.
Izinzuzo eziyinhloko ze-tantalum carbide camera graphite sheet zihlanganisa:
1. Ukumelana nokushisa okuphezulu: I-Tantalum carbide inezinga eliphezulu lokuncibilika kanye nokuzinza okuhle kakhulu kwezinga lokushisa, okwenza ishidi le-graphite eliboshiwe lilungele ukusetshenziswa ezindaweni ezishisayo.
2. Ukumelana nokugqwala: I-Tantalum carbide coating ingamelana nokuguguleka kwamakhemikhali amaningi ezinto ezonakalisayo futhi andise impilo yesevisi yezinto.
3. Ubulukhuni obuphezulu: Ukuqina okuphezulu kwe-tantalum carbide ungqimba omncane kunikeza ukumelana okuhle kokugqoka futhi kulungele izinhlelo zokusebenza ezidinga ukumelana nokugqoka okuphezulu.
4. Ukuzinza kwamakhemikhali: I-Tantalum carbide coating inokuqina okuhle kakhulu ekugqwaleni kwamakhemikhali futhi ifanele ukusetshenziswa kweminye imithombo yezindaba ebolayo.
nge-TaC nangaphandle kwayo
Ngemva kokusebenzisa i-TaC (kwesokudla)
Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu:
