Ingalo ephethe i-waferiyithuluzi elibalulekile elisetshenziswa enqubweni yokukhiqiza i-semiconductor ukuphatha, ukudluliswa kanye nesikhundlaizinkwa eziwucwecwe. Ngokuvamile iqukethe ingalo yerobhothi, i-gripper kanye nesistimu yokulawula, enekhono elinembile lokunyakaza nokubeka indawo.I-wafer ephethe izingaloasetshenziswa kakhulu kuzixhumanisi ezahlukahlukene ekukhiqizeni ama-semiconductor, okubandakanya izinyathelo zenqubo ezifana nokulayisha i-wafer, ukuhlanza, ukubekwa kwefilimu emincane, i-etching, i-lithography kanye nokuhlola. Ukunemba kwayo, ukwethembeka namandla ayo okuzenzakalela kubalulekile ukuze kuqinisekiswe ikhwalithi, ukusebenza kahle kanye nokungaguquguquki kwenqubo yokukhiqiza.
Imisebenzi eyinhloko yengalo yokuphatha i-wafer ihlanganisa:
1. Ukudluliswa kwe-wafer: Ingalo ephethe i-wafer iyakwazi ukudlulisa ngokunembile ama-wafers ukusuka endaweni eyodwa kuya kwenye, njengokuthatha ama-wafers endaweni yokubeka isitoreji futhi uwabeke kudivayisi yokucubungula.
2. Ukuma nokuma: Ingalo ephethe i-wafer iyakwazi ukubeka ngokunembile futhi iqondise i-wafer ukuze kuqinisekiswe ukuqondana okulungile kanye nokuma kokucubungula okulandelayo noma imisebenzi yokukala.
3. Ukubamba nokukhulula: Izingalo ezibamba i-wafer ngokuvamile zifakwe izinto zokubamba ezingabamba ngokuphephile ama-wafers futhi ziwakhulule lapho kudingeka ukuze kuqinisekiswe ukudluliswa okuphephile nokubamba ama-wafers.
4. Ukulawula okuzenzakalelayo: Ingalo ephethe i-wafer ifakwe isistimu yokulawula ethuthukisiwe engakwazi ukwenza ngokuzenzakalelayo ukulandelana kwesenzo esinqunywe kusengaphambili, ithuthukise ukusebenza kahle kokukhiqiza futhi inciphise amaphutha abantu.
Izimpawu kanye nezinzuzo
1.Izilinganiso eziqondile kanye nokuzinza kokushisa.
I-2.Ukuqina okuqondile okuphezulu kanye nokufana okuhle kakhulu kokushisa, ukusetshenziswa kwesikhathi eside akulula ukugoba ukuguqulwa.
I-3.Inobuso obushelelezi nokumelana okuhle kokugqoka, ngaleyo ndlela iphathe ngokuphepha i-chip ngaphandle kokungcola kwezinhlayiyana.
I-4.I-silicon carbide resistivity ku-106-108Ω, engeyona i-magnetic, ngokuhambisana nezidingo zokucaciswa kwe-anti-ESD; Kungavimbela ukunqwabelana kukagesi omile ebusweni be-chip.
I-5.I-conductivity enhle yokushisa, i-coefficient ephansi yokwandisa.
