Isibambi se-wafer

Incazelo emfushane:

I-Semicera ihlinzeka ngezibambi ze-Wafer ezinembayo ezidizayinelwe izinqubo ze-Si Epitaxy kanye ne-SiC Epitaxy ukuze kuqinisekiswe ukuzinza kwe-wafer phakathi nenqubo ye-epitaxy. I-Semicera's Wafer Holders ifanele izicelo ze-MOCVD Susceptor kanye ne-Barrel Susceptor, ezingathuthukisa kakhulu ukunemba kanye nekhwalithi yokukhiqizwa kwe-Monocrystalline Silicon.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Kungani i-Silicon Carbide ihlanganiswa?

Isibambi se-waferiyingxenye ebalulekile yenqubo ye-epitaxy. I-Semicera inikeza ukusekelwa okungcono kakhulu kweI-EpitaxyfuthiI-SiC Epitaxyizinqubo ngokuklama okuhle kakhulu nokukhiqiza. Isibambi sethu se-Wafer singaqinisekisa ukuthi i-wafer ihlala imile kahle ngesikhathi senqubo ye-epitaxy, iqinisekisa ukufana kokushisa nokusatshalaliswa komoya, ikakhulukazi ukudlala indima ebalulekileI-MOCVD SusceptorfuthiUmgqomo Susceptor. Kungakhathaliseki ukuthi ukufakwa kwe-silicon ye-monocrystalline (i-Monocrystalline Silicon) noma inqubo yokubeka umhwamuko wamakhemikhali eyinkimbinkimbi, Isibambi Sesilulo se-Semicera singaqinisekisa ukwakheka kwekristalu yekhwalithi ephezulu kanye nokukhula kongqimba lwe-epitaxial okuzinzile.

I-Wafer Holder ye-Semicera yenziwe ngezinto ezisezingeni eliphezulu ezimelana nezinga lokushisa, ezinamandla amakhulu ngokwemishini kanye nokuzinza kwe-thermal, futhi ingasetshenziswa isikhathi eside ekushiseni okuphezulu nasezindaweni zamakhemikhali eziyinkimbinkimbi ngaphandle kokwehluleka. Ikakhulukazi kuI-EpitaxyfuthiI-SiC Epitaxyizinqubo, I-Wafer Holder ye-Semicera inciphisa izinga elingasebenzi kahle kanye nokulahleka kwe-wafer ohlelweni ngokulawula okunembile nokukhetha okuhle kakhulu kwezinto.

Sihlinzeka ngezifisoI-waferAbaphathi bezinqubo ezahlukene kanye nezidingo zemishini, ikakhulukazi ku-MOCVD Susceptor kanye ne-Barrel Susceptor izicelo. Imikhiqizo ye-Semicera ayigcini nje ngokunweba impilo yemishini, kodwa futhi ithuthukisa ukusebenza kahle nokuzinza kwenqubo ye-epitaxy, iqinisekisa ukuthi ukukhiqizwa kwe-wafer ngayinye kuhlangabezana nezindinganiso eziqinile zezimboni.

I-Semicera ibilokhu izibophezele ekuhlinzekeni amakhasimende nge-Wafer Holders esebenza kahle kakhulu, kungakhathaliseki ukuthi eye-R&D noma ukukhiqizwa ngobuningi, ukuze ihlangabezane nezidingo ezihlukahlukene zamakhasimende kuzinqubo ze-Si Epitaxy kanye ne-SiC Epitaxy. Siyaqhubeka nokusungula izinto ezintsha ukuze siqinisekise ukuthi amakhasimende angathola ikhwalithi yomkhiqizo ehamba phambili kanye nokulawulwa kwenqubo kunqubo yokukhiqiza i-semiconductor.