I-6'' Wafer Carrier ye-Aixtron G5 ye-Semicera yakhelwe ukuhlangabezana nezidingo ezidingekayo zezinqubo zokukhula kwe-epitaxial kumasistimu e-Aixtron G5. Yakhiwe nge-graphite yekhwalithi ephezulu, lokhuumthwali we-waferiqinisekisa ukuzinza nokufana ngesikhathiI-CVDfuthiIzinqubo ze-MOCVD, enika amandla ukufakwa okunembayo ku-epi reactor.
Ngei-silicon carbide ceramici-coating, i-6'' Wafer Carrier ye-Aixtron G5 inikeza ukuqina okuthuthukisiwe kanye nokumelana nokushisa, okuyenza ilungele ukusetshenziswa kwezinga lokushisa eliphezulu ekukhuleni kwe-epitaxial. Lo mkhiqizo uklanyelwe ukusekela ngempumeleloisilucwecwanaukuphatha kanye nokwandisa ukusebenza ekukhiqizeni kwe-semiconductor.
Kwa-Semicera, sigxile ekuhlinzekeni izixazululo ze-top-tier yemboni ye-semiconductor. Izithwali zethu ze-wafer zakhelwe ukwethembeka, ziqinisekisa ukusebenza kahle ezinhlelweni ze-Aixtron G5 nezinye.I-epitaxy ye-CVDama-reactors. Noma ngabe usebenza nge-silicon carbide noma ezinye izinto, lesi sithwali se-wafer siqinisekisa ukunemba nokuvumelana okudingekayo ekukhiqizeni okuthuthukisiwe kwe-semiconductor.
Izici Eziyinhloko:
• Kwenzelwe amasistimu e-Aixtron G5 nezinye izisabeli ze-CVD MOCVD.
• I-graphite susceptor yekhwalithi ephezulu ene-silicon carbide ceramic coating yokuqina okuthuthukisiwe.
• Ilungele izinqubo zokukhula kwe-epitaxial ezidinga ukunemba nokuzinza kwe-thermal.
• Ukuphathwa kwe-wafer okuthembekile ezindaweni eziyinkimbinkimbi ze-semiconductor.
I-Semicera inikezelwe ekuhlinzekeni izixazululo ezisezingeni eliphezulu, iqinisekisa ukuthi zonke i-6'' Wafer Carrier zihlangabezana nezindinganiso eziphakeme kakhulu zezidingo zakho ze-epitaxy.