I-AlN Heater by semicera iyisixazululo esithuthukisiwe sokushisisa esakhiwe nge-aluminium nitride ceramic, esidizayinelwe izinhlelo zokusebenza ezisebenza kahle kakhulu ezimbonini ezifana nama-semiconductors, amasistimu wevacuum, nokunye. Le heater esezingeni eliphakeme yale heater kanye nokufakwa kukagesi kuyenza ilungele ukushisisa okunembayo ezindaweni ezidinga kakhulu njengokucutshungulwa kwe-wafer, ama-vacuum evaporator, nemishini yokufafaza.
Ku-semicera, siyaziqhenya ngokuletha imikhiqizo yezinga eliphezulu ehlangabezana nezidingo zemboni, futhi i-AlN Heater iyafana. Kwenziwe nge-aluminium nitride (i-AlN), le heater inikeza ukumelana nokushisa okuhle kakhulu, ukunwetshwa kokushisa okuphansi, kanye nekhono lokumelana nezinga lokushisa elidlulele ngaphandle kokuphazamisa ukusebenza. Ukusatshalaliswa kwayo kokushisa okusebenzayo kuyenza ifanelekele izinqubo ezibucayi ezifana ne-chemical vapor deposition (CVD) nezinye izinhlelo zokusebenza zefilimu elincanyana.
Ukwengeza, i-AlN Heater ilungele ukuhlanganiswa kuma-wafer heater kanye nama-vacuum evaporator, okuyenza ibe yisixazululo esisebenza ngezindlela eziningi kubakhiqizi abathembele ezingxenyeni zokufudumeza ezingaguquki, zekhwalithi ephezulu. Ngomshini we-aluminium nitride kanye ne-nitride enembile yokwakhiwa kwe-aluminium, iheater yakhelwe ukwethembeka kwesikhathi eside nokulawula ukushisisa ngokunemba.
Uma ufuna isixazululo se-AlN aluminium nitride ehamba phambili kukho kokubili ukuqina nokusebenza kahle, i-semicera inikeza inketho ethembekile ku-AlN Heater. Le heater ye-ceramic ethuthukisiwe isekela ubuchwepheshe obusezingeni eliphezulu ezinqubweni ze-CVD, i-sputtering, nezinye izinhlelo zokusebenza ze-semiconductor, okusiza ukugcina ubuqotho benqubo ezindaweni ezisezingeni eliphezulu.
