Izifudumezi zikagesi ze-graphite ezikwazi ukumelana nokushisa okuphezulu zingasetshenziswa ezithandweni ze-vacuum

Incazelo emfushane:

I-Semicera AmandlaUkulinganisa kwenkampani Technology Co., Ltd.ungumhlinzeki ohamba phambili onguchwepheshe be-wafer kanye nezinto ezisetshenziswayo ze-semiconductor eziphambili.Sizinikezele ekuhlinzekeni ngemikhiqizo yekhwalithi ephezulu, ethembekile, nentsha ekukhiqizeni ama-semiconductor,imboni ye-photovoltaicnezinye izinkambu ezihlobene.

Umugqa wethu womkhiqizo uhlanganisa imikhiqizo ye-graphite ehlanganiswe ne-SiC/TaC nemikhiqizo yobumba, ehlanganisa izinto ezihlukahlukene ezifana ne-silicon carbide, i-silicon nitride, ne-aluminium oxide nokunye.

Njengomhlinzeki othembekile, siyakuqonda ukubaluleka kwezinto ezisetshenziswayo ohlelweni lokukhiqiza, futhi sizibophezele ekuletheni imikhiqizo ehlangabezana namazinga aphezulu ekhwalithi ukuze sifeze izidingo zamakhasimende ethu.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Izici eziyinhloko ze-heater graphite:

1. ukufana kwesakhiwo sokushisa.

2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.

3. ukumelana nokugqwala.

4. i-inoxidizability.

5. ukuhlanzeka kwamakhemikhali aphezulu.

6. amandla aphezulu emishini.

Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi. Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.

Imingcele eyinhloko ye-graphite heater

Ukucaciswa Kwezobuchwepheshe	I-VET-M3
Ukuminyana kwenqwaba (g/cm3)	≥1.85
Okuqukethwe komlotha (PPM)	≤500
Ukuqina Kwasogwini	≥45
Ukumelana Okuqondile (μ.Ω.m)	≤12
Amandla e-Flexural (Mpa)	≥40
Amandla Acindezelayo (Mpa)	≥70
Ubukhulu. Usayizi Wokusanhlamvu (μm)	≤43
I-Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6