I-MOCVD 3×2”Isisetshenziswa

I-MOCVD 3×2”Isithombe Esifakiwe Isisetshenziswa

Incazelo emfushane:

I-Semicera inikeza ikhwalithi ephezulu ye-MOCVD 3×2” Susceptors, eklanyelwe ngokukhethekile izinqubo ze-Si Epitaxy kanye ne-SiC Epitaxy. Ama-Susceptors we-MOCVD we-Semicera anokuqhuba kahle okushisayo nokuqina, ahlangabezana namazinga aphezulu adingekayo ku-Monocrystalline Silicon epitaxy.

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Imininingwane Yomkhiqizo

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I-Semicera'sI-MOCVDI-3x2” Susceptor iyingxenye ebalulekile eklanyelwe ngokukhethekile izinqubo ze-epitaxy embonini ye-semiconductor, ikakhulukaziI-EpitaxyfuthiI-SiC Epitaxyizinqubo. II-MOCVD Susceptoriqinisekisa ukusatshalaliswa kwezinga lokushisa okufanayo ngesikhathi senqubo ye-epitaxy ngokusebenzisa i-conductivity yokushisa ethuthukisiwe, ngaleyo ndlela ithuthukise ukunemba kanye nekhwalithi ye-monocrystalline silicon (Monocrystalline Silicon) deposition.

I-Semicera ibilokhu igxile ekuhlinzekeni amakhasimende nge-MOCVD 3x2” Susceptors yekhwalithi ephezulu. Yenziwe ngezinto ezithuthukisiwe, lo mkhiqizo awunawo ukumelana nokushisa okuphezulu kakhulu, kodwa futhi uhlala uzinzile ezindaweni eziyinkimbinkimbi zamakhemikhali. Isebenza kahle kumishini ehlukahlukene ye-epitaxy, ikakhulukazi kuUmgqomo Susceptorizinhlelo zokusebenza, nokuthembeka nokusebenza kwayo kwaziwa kabanzi.

Sihlinzeka nge-MOCVD Susceptors eyenziwe ngezifiso ngezidingo ezihlukene zenqubo yokukhulisa ukusebenza kahle kokukhiqiza nokunciphisa ukulahleka kwezinto. I-Semicera's MOCVD 3x2” Susceptor ayigcini nje ngokunweba impilo yezinto zokusebenza, kodwa futhi inikeza ukwesekwa okuzinzile kweI-EpitaxyfuthiI-SiC Epitaxyizinqubo ngomklamo onembile, oqinisekisa ukuvumelana kwekhwalithi ye-epitaxial layer kanye nokuhlanzeka okuphezulu komkhiqizo.

I-Semicera ihlale izibophezele ekuhlinzekeni amakhasimende ngezingxenye zemishini ye-epitaxial ethembekile, ehlala isikhathi eside futhi ephumelelayo. Kungakhathaliseki ukuthi kusendaweni yaselabhorethri noma ukukhiqizwa kwezimboni ezinkulu, i-MOCVD 3x2” Susceptor ingahlangabezana nezimfuneko zobuchwepheshe eziqinile, isize amakhasimende ukuba afinyelele ukulawulwa kwenqubo ephakeme kanye nokuphuma okungcono komkhiqizo.