II-MOCVDIndlela ingenye yezinqubo ezinzile kakhulu ezisetshenziswa embonini ukukhulisa amafilimu amancane e-crystalline ekhwalithi ephezulu, njengama-epilayers esigaba esisodwa se-InGaN, izinto zokwakha ze-III-N, namafilimu e-semiconductor anezakhiwo eziningi ze-quantum well, futhi ibaluleke kakhulu ukukhiqizwa kwemishini ye-semiconductor kanye ne-optoelectronic.
II-SiC coating MOCVD susceptoriyisiphathi esiyisicwecwana esikhethekile esigcotshwe nge-silicon carbide (SiC) sasoi-epitaxial ukukhula kunqubo ye-metal organic chemical vapor deposition (MOCVD).
I-SiC coating inokumelana okuhle kakhulu kwamakhemikhali nokuzinza kokushisa, okuyenza ibe yinketho ekahle kuma-MOCVD susceptors asetshenziswa ekufuneni izinqubo zokukhula kwe-epitaxial.
Ingxenye eyinhloko yenqubo ye-MOCVD i-susceptor, okuyisici esibalulekile sokuqinisekisa ukufana kanye nekhwalithi yamafilimu amancane akhiqiziwe.
Yini i-susceptor? I-susceptor iyisakhi esikhethekile esisetshenziswa kunqubo ye-MOCVD ukusekela nokushisisa i-substrate lapho ifilimu elincanyana lifakwa khona. Inemisebenzi eminingi, ehlanganisa ukumunca amandla kazibuthe kagesi, ukuwaguqulela ekushiseni, nokusabalalisa ngokulinganayo ukushisa ku-substrate. Lokhu kushisa okufanayo kubalulekile ekukhuleni kwamafilimu amancane afanayo anogqinsi olunembile kanye nokwakheka.
Izinhlobo ze-susceptors:
1. Ama-Graphite susceptors: Ama-Graphite susceptors avame ukumbozwa ngesendlalelo esivikelayo njengei-silicon carbide (SiC), eyaziwa ngokusebenza kwayo okuphezulu kokushisa nokuzinza. IUkufakwa kwe-SiCinikeza indawo eqinile, evikelayo emelana nokugqwala nokuwohloka emazingeni okushisa aphezulu.
2. I-Silicon carbide (SiC) susceptors: Lawa ma-susceptors enziwe ngokuphelele nge-SiC futhi anokuqina okuhle kakhulu kokushisa nokumelana nokugqoka. Ama-SiC susceptors afaneleka kakhulu izinqubo ezishisa kakhulu kanye nezindawo ezigqwalile.
Indlela ama-susceptors asebenza ngayo ku-MOCVD:
Enqubweni ye-MOCVD, izandulela zingeniswa ekamelweni lokusabela lapho zibola khona futhi zisabele ukwenza ifilimu elincanyana ku-substrate. I-susceptor idlala indima ebalulekile ngokuqinisekisa ukuthi i-substrate ishisa ngokulinganayo, okubalulekile ekuzuzeni izici zefilimu ezingaguquki kuyo yonke indawo engaphansi. Impahla kanye nomklamo we-susceptor kukhethwa ngokucophelela ukuze kuhlangatshezwane nezidingo ezithile zenqubo yokubeka, njengebanga lokushisa kanye nokuhambisana kwamakhemikhali.
Izinzuzo zokusebenzisa ama-susceptors ekhwalithi ephezulu:
• Ikhwalithi yefilimu ethuthukisiwe: Ngokuhlinzeka ngokusatshalaliswa kokushisa okufanayo, i-susceptor isiza ukufeza amafilimu anogqinsi olungaguquki kanye nokwakheka, okubalulekile ekusebenzeni kwamadivayisi we-semiconductor.
• Ukusebenza kahle kwenqubo okuthuthukisiwe: Izinqamuli zekhwalithi ephezulu zandisa ukusebenza kahle okuphelele kwenqubo ye-MOCVD ngokunciphisa amathuba okuba namaphutha nokwandisa isivuno samafilimu asebenzisekayo.
• Ubude besikhathi sokuphila nokwethembeka: Izinto ezisetshenziswayo ezenza izinto ezihlala isikhathi eside njenge-SiC ziqinisekisa ukwethembeka kwesikhathi eside futhi zinciphisa izindleko zokuzilungisa.
I-susceptor iyingxenye ebalulekile yenqubo ye-MOCVD futhi ithinta ngokuqondile ikhwalithi nokusebenza kahle kokufakwa kwefilimu encane. Ukuze uthole ulwazi olwengeziwe ngamasayizi atholakalayo, ama-MOCVD susceptors namanani, sicela ungangabazi ukusithinta. Onjiniyela bethu bazokujabulela ukukweluleka ngezinto ezifanele futhi baphendule yonke imibuzo yakho.
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Isikhathi sokuthumela: Aug-12-2024