I-Metal-Organic Chemical Vapor Deposition (MOCVD) iyinqubo ebalulekile embonini ye-semiconductor, lapho amafilimu amancane ekhwalithi ephezulu efakwa kuma-substrates. Ingxenye ebalulekile yenqubo ye-MOCVD i-susceptor, isici esibalulekile esidlala indima ebalulekile ekuqinisekiseni ukufana kanye nekhwalithi yamafilimu akhiqizwayo.
Yini i-Susceptor? I-susceptor isakhi esikhethekile esisetshenziswa enqubweni ye-MOCVD ukusekela nokushisisa i-substrate okufakwa kuyo amafilimu amancane. Inikeza imisebenzi eminingi, okuhlanganisa ukumunca amandla kazibuthe kagesi, ukuwaguqulela ekushiseni, nokusabalalisa ngokulinganayo lokhu kushisa kuyo yonke i-substrate. Lokhu kushisa okufanayo kubalulekile ekukhuleni kwamafilimu afanayo anogqinsi olunembile nokwakheka.
Izinhlobo ze-Susceptors:
1. I-Graphite Susceptors: Ivamise ukumbozwa ngesendlalelo esivikelayo, njengei-silicon carbide (SiC), ama-graphite susceptors aziwa ngokushisa kwawo okuphezulu kanye nokuzinza. IUkufakwa kwe-SiCinikeza indawo eqinile, evikelayo emelana nokugqwala nokuwohloka emazingeni okushisa aphezulu.
2. I-Silicon Carbide (SiC) Susceptors: Lezi zenziwe ngokuphelele nge-SiC, zinikeza ukuzinza okuhle kakhulu kokushisa nokumelana nokuguga.I-SiC susceptorszilungele ikakhulukazi izinqubo ezisezingeni eliphezulu kanye nezindawo ezigqwalile.
KanjaniAbasusiSebenza ku-MOCVD:
Enqubweni ye-MOCVD, izandulela zingeniswa ekamelweni le-reactor, lapho zibola futhi zisabele ukwenza ifilimu elincanyana ku-substrate. I-susceptor idlala indima ebalulekile ngokuqinisekisa ukuthi i-substrate ishiselwa ngendlela efanayo, okubalulekile ekuzuzeni izici zefilimu ezingaguquki kuyo yonke indawo engaphansi. Impahla ye-susceptor kanye nomklamo kukhethwa ngokucophelela ukuze kufane nezidingo ezithile zenqubo yokubeka, njengebanga lokushisa kanye nokuhambisana namakhemikhali.
Izinzuzo ZokusebenzisaAma-Susceptors aphezulu:
• Ikhwalithi Yefilimu Ethuthukisiwe: Ngokuhlinzeka ngokusatshalaliswa kokushisa okufanayo, izinto ezibamba ukushisa zisiza ekuzuzeni amafilimu anogqinsi olungaguquki kanye nokwakheka, okubalulekile ekusebenzeni kwamadivayisi e-semiconductor.
• Ukwenyuka Kwenqubo Esebenza Ngayo: Izixhumi zekhwalithi ephezulu zithuthukisa ukusebenza kahle okuphelele kwenqubo ye-MOCVD ngokunciphisa amathuba okuba nokukhubazeka nokwandisa isivuno samafilimu asebenzisekayo.
• Ubude besikhathi eside nokuthembeka: Izinto ezisetshenziswayo ezenziwe ngezinto ezihlala isikhathi eside njenge-SiC ziqinisekisa ukwethembeka kwesikhathi eside kanye nezindleko zokunakekela ezincishisiwe.
Isiphetho: I-susceptor iyingxenye ebalulekile yenqubo ye-MOCVD, enomthelela ngqo kwikhwalithi nokusebenza kahle kokufakwa kwefilimu emincane. Ngokukhetha okubalulekile kwe-susceptor nedizayini efanele, abakhiqizi be-semiconductor bangakwazi ukuthuthukisa izinqubo zabo, okuholela ekusebenzeni okungcono kwedivayisi kanye nezindleko zokukhiqiza eziphansi. Njengoba isidingo semishini kagesi esebenza kahle kakhulu siqhubeka sikhula, ukubaluleka kwekhwalithi ephezulu ye-MOCVD susc
Isikhathi sokuthumela: Aug-12-2024