I-Tantalum carbide (TaC)iyimpahla ye-ceramic ekwazi ukumelana nokushisa okuphezulu kakhulu enezinzuzo zokuncibilika okuphezulu, ubulukhuni obuphezulu, ukuqina okuhle kwamakhemikhali, ukuguquguquka okunamandla kagesi kanye ne-thermal, njll.I-TaC coatingingasetshenziswa njenge-ablation-resistant coating, i-oxidation-resistant coating, kanye ne-coating-resistant-resistant, futhi isetshenziswa kabanzi ekuvikelweni kokushisa kwe-aerospace, ukukhula kwekristalu ye-semiconductor yesizukulwane sesithathu, amandla kagesi kanye neminye imikhakha.
Inqubo:
I-Tantalum carbide (TaC)iwuhlobo lwempahla ye-ceramic ekwazi ukumelana nokushisa okuphezulu kakhulu enezinzuzo zephuzu elincibilikayo eliphezulu, ubulukhuni obuphezulu, ukuzinza okuhle kwamakhemikhali, ukuguquguquka okuqinile kukagesi nokushisayo. Ngakho-ke,I-TaC coatingingasetshenziswa njenge-ablation-resistant coating, i-oxidation-resistant coating, kanye ne-coating-resistant-resistant, futhi isetshenziswa kabanzi ekuvikelweni kokushisa kwe-aerospace, ukukhula kwekristalu ye-semiconductor yesizukulwane sesithathu, amandla kagesi kanye neminye imikhakha.
Izimpawu zangaphakathi zama-coatings:
Sisebenzisa indlela ye-slurry-sintering ukuze silungiseleleI-TaC coatingsyobukhulu obuhlukahlukene kuma-graphite substrates anosayizi abahlukahlukene. Okokuqala, impushana ehlanzeke kakhulu equkethe umthombo we-Ta kanye nomthombo we-C ilungiswa nge-dispersant kanye ne-binder ukuze kwakheke umfaniswano kanye nodaka lwesandulela oluzinzile. Ngesikhathi esifanayo, ngokusho ubukhulu izingxenye graphite kanye nezidingo ukushubaI-TaC coating, i-pre-coating ilungiswa ngokufafaza, ukuthulula, ukungena kanye nezinye izinhlobo. Okokugcina, ishisiswe ibe ngaphezu kuka-2200 ℃ endaweni ye-vacuum ukuze kulungiswe umfaniswano, ominyene, wesigaba esisodwa, kanye ne-crystalline kahle.I-TaC coating.
Izimpawu zangaphakathi zama-coatings:
Ugqinsi lweI-TaC coatingicishe ibe ngu-10-50 μm, okusanhlamvu kukhule ku-orientation yamahhala, futhi yakhiwe i-TaC ngesakhiwo se-cubic yesigaba esisodwa esigxile ebusweni, ngaphandle kokunye ukungcola; i-coating iminyene, isakhiwo siphelele, futhi i-crystallinity iphezulu.I-TaC coatingingagcwalisa ama-pores ebusweni be-graphite, futhi iboshwe ngamakhemikhali ku-matrix ye-graphite enamandla amakhulu okubopha. Isilinganiso sika-Ta kuya ku-C ekuhlanganiseni sisondele ku-1:1. Ireferensi ye-GDMS yokuthola ubumsulwa ejwayelekile ASTM F1593, ukugxiliswa kokungcola kungaphansi kuka-121ppm. I-arithmetic mean deviation (Ra) yephrofayili yokumboza ingu-662nm.
Izicelo Ezijwayelekile:
GaN futhiI-SiC epitaxialIzingxenye ze-CVD reactor, okuhlanganisa abathwali be-wafer, izitsha zesathelayithi, ama-showerheads, amakhava aphezulu nama-susceptors.
I-SiC, i-GaN kanye nezingxenye zokukhula kwekristalu ye-AlN, okuhlanganisa iziphambano, izibambi zekristalu yembewu, iziqondiso zokugeleza nezihlungi.
Izingxenye zezimboni, ezifaka izinto zokushisisa ezikwazi ukumelana nokumelana, imibhobho, izindandatho ezivikelayo nezinsimbi zokubhsa.
Izici ezibalulekile:
Ukuqina kwezinga lokushisa eliphezulu ku-2600 ℃
Inikeza ukuvikelwa kwesimo esiqinile ezindaweni zamakhemikhali ezinokhahlo ze-H2, NH3, SiH4kanye ne-Si vapor
Ifanele ukukhiqizwa ngobuningi ngemijikelezo emifushane yokukhiqiza.
