I-Tantalum carbide (TaC) ihlanganiswe nokuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa nokumelana namakhemikhali aphezulu

Incazelo emfushane:

I-TaC enamathela iyisizukulwane esisha sezinto ezimelana nokushisa okuphezulu, ezinokuqina okungcono kwezinga lokushisa kune-SiC, njenge-coating emelana nokugqwala, i-oxidation ukumelana ne-oxidation, ukugqoka okuqinile, ingasetshenziswa endaweni engaphezu kuka-2000 ℃, esetshenziswa kabanzi ku-aerospace ultra- izinga lokushisa eliphezulu izingxenye ezishisayo ekupheleni, isizukulwane sesithathu semiconductor single crystal ukukhula kanye nezinye izinkambu.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Semicera Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN nezingqimba ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor.Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.

Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D.Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile.Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye zikaSimicera zokukhula kwekristalu eyodwa.

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nge-TaC nangaphandle kwayo

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Ngemva kokusebenzisa i-TaC (kwesokudla)

Ukwengeza, impilo yesevisi yemikhiqizo yokumboza ye-TaC ye-Semicera yinde futhi imelana kakhulu nezinga lokushisa eliphezulu kunaleyo yokunamathela kwe-SiC.Ngemva kwesikhathi eside sedatha yokulinganisa ilabhorethri, i-TaC yethu ingasebenza isikhathi eside ezingeni eliphakeme lika-2300 degrees Celsius.Alandelayo amanye amasampula ethu:

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(a) Umdwebo ohleliwe wensiza ekhulayo ye-SiC single crystal ingot ngendlela ye-PVT (b) Ubakaki wembewu ohlanganiswe ne-TaC ephezulu (okuhlanganisa nembewu ye-SiC) (c) indandatho ye-graphite ehlanganiswe ne-TAC

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Isici esiyinhloko
Semicera Indawo yokusebenza
Indawo yokusebenza ye-Semicera 2
Umshini wezinsimbi
Ukucutshungulwa kwe-CNN, ukuhlanza amakhemikhali, i-CVD coating
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