Amasongo e-graphite ahlanganiswe ne-TaCbhekisela ekubekweni kongqimba oluncane lwei-tantalum carbideebusweni bendandatho yomhlahlandlela we-graphite ukuthuthukisa ukumelana kwayo nokugqoka, ukumelana nokushisa okuphezulu nokuzinza kwamakhemikhali. Lokhu kunamathela kuvame ukwakhiwa phezu kwendandatho yomhlahlandlela we-graphite ngamasu afana ne-physical vapor deposition (PVD) noma i-chemical vapor deposition (CVD).
I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.
Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.
Izici eziyinhloko zamasongo e-graphite ahlanganiswe ne-TaC zifaka:
1. Ukumelana nezinga lokushisa eliphezulu: I-TaC enamathelayo inokuqina okuhle kakhulu kwezinga lokushisa eliphezulu futhi ingagcina ukuzinza ezindaweni zokushisa okuphezulu.
2. Ukumelana nokugqoka: Ukuqina okuphezulu kongqimba oluncane lwe-tantalum carbide kunikeza indandatho yomhlahlandlela ukumelana okuhle nokugqokwa futhi kwandisa impilo yayo yesevisi.
3. Ukuzinza kwamakhemikhali: I-TaC enamathelayo inokuqina okuphezulu ngokumelene nokugqwala kwamakhemikhali, okuyenza ifanelekele ukusetshenziswa kweminye imithombo yezindaba egqwalayo.
4. Yehlisa ukungqubuzana: I-TaC enamathelayo inganciphisa ngempumelelo ukungqubuzana phakathi kwendandatho yomhlahlandlela we-graphite nezinye izakhi futhi kuthuthukise ukusebenza kahle kwezigxivizo zemishini.
nge-TaC nangaphandle kwayo
Ngemva kokusebenzisa i-TaC (kwesokudla)
Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu:
