I-SemiceraI-TaC Coating Chuck, i-vacuum chuck esezingeni eliphezulu efakweI-TaC coatings, eklanyelwe ngokukhethekile izithando zomlilo ze-semiconductor. Njengoba iklanyelwe ukuhlangabezana nezidingo ezinzima zezinqubo zesimanje zokukhiqiza i-semiconductor, lobu buchwepheshe obusha bubeka izinga elisha lokunemba, ukwethembeka, nokuphila isikhathi eside.
Enhliziyweni yokwenziwa kwe-semiconductor kunesidingo esibalulekile sokulawula okunembayo nokuzinza ngesikhathi sokucubungula. I-TaC Coating Chuck ibhekana nalesi sidingo ngokuhlanganisa okuthuthukileTaC (Tantalum Carbide).endaweni yayo, iqinisekisa ukuzinza okushisayo, ukuqina, nokumelana nokugqwala kwamakhemikhali. Le nhlanganisela yezinto eziyingqayizivele ayigcini nje ngokuthuthukisa ukusebenza kwe-chuck kodwa futhi inweba isikhathi sayo sokusebenza, inikeze imiphumela engaguquki emijikelezweni eminingi.
Enye yezinzuzo ezibalulekile ze-TaC Coating Chuck amandla ayo okugcina izinga eliphezulu lobuqotho be-vacuum kuwo wonke umjikelezo wokucubungula. Ngokunciphisa ngempumelelo ukuphuma nokungcola, lobu buchwepheshe buqinisekisa ubumsulwa nekhwalithi yezinto ezisetshenziswayo ze-semiconductor, okuholela ekusebenzeni okuphakeme kwedivayisi nokuthembeka.
Ngaphezu kwalokho, i-TaC Coating Chuck inikeza ukuguquguquka okungenakuqhathaniswa, okuhlanganisa izinhlobonhlobo zama-semiconductor substrates ezinosayizi abahlukahlukene kanye nejometri. Idizayini eyenziwe ngendlela oyifisayo ye-TaC Coating Chuck ivumela ukuhlanganiswa okungenamthungo ezinhlelweni ezikhona zesithando somlilo se-semiconductor, ukunciphisa isikhathi sokuphumula nokukhulisa umkhiqizo.
Nge-TaC Coating Chuck, abakhiqizi be-semiconductor bangafinyelela ukukhiqiza okuphezulu, isivuno esithuthukisiwe, kanye nokunciphisa izindleko zizonke. Noma ngabe kukumalabhorethri ocwaningo noma ezikhungweni zokukhiqiza ezinevolumu ephezulu, lobu buchwepheshe obuthuthukile bunika amandla ochwepheshe be-semiconductor ukuthi basunduze imingcele yokuqamba izinto ezintsha kuyilapho begcina izindinganiso eziqinile zekhwalithi.
nge-TaC nangaphandle kwayo
Ngemva kokusebenzisa i-TaC (kwesokudla)
Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu:
