I-Tantalum Carbide Coating Pedestal Support Plate

Incazelo emfushane:

I-Tantalum Carbide Coated Susceptor Support Plate kaSemicera yakhelwe ukusetshenziswa ku-silicon carbide epitaxy kanye nokukhula kwekristalu. Ihlinzeka ngosekelo oluzinzile endaweni enezinga lokushisa eliphezulu, ebolayo, noma enengcindezi ephezulu, ebalulekile kulezi zinqubo ezithuthukisiwe. Okuvame ukusetshenziswa kuma-reactors anengcindezi ephezulu, izakhiwo zesithando somlilo, kanye nemishini yamakhemikhali, iqinisekisa ukusebenza kwesistimu nokuzinza. Ubuchwepheshe bokuhlanganisa obusha be-Semicera buqinisekisa ikhwalithi ephezulu nokuthembeka kwezicelo zobunjiniyela ezifunayo.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Ipuleti lokusekela le-Tantalum carbide elihlanganiswe ne-susceptoriyi-susceptor noma isakhiwo sokusekela esimbozwe ungqimba oluncane lwei-tantalum carbide. Lokhu kunamathela kungakhiwa endaweni ye-susceptor ngamasu afana ne-physical vapor deposition (PVD) noma i-chemical vapor deposition (CVD), enikeza i-susceptor izakhiwo eziphakemei-tantalum carbide.

I-Semicera ihlinzeka ngezingubo ezikhethekile ze-tantalum carbide (TaC) zezingxenye ezihlukahlukene nabathwali.Inqubo yokugqoka ehamba phambili ye-Semicera yenza i-tantalum carbide (TaC) ikwazi ukufeza ukuhlanzeka okuphezulu, ukuzinza okuphezulu kwezinga lokushisa kanye nokubekezelelana kwamakhemikhali aphezulu, ukuthuthukisa ikhwalithi yomkhiqizo wamakristalu e-SIC/GAN kanye nezendlalelo ze-EPI (I-Graphite embozwe nge-TaC susceptor), kanye nokwelula impilo yezingxenye ezibalulekile ze-reactor. Ukusetshenziswa kwe-tantalum carbide TaC coating ukuxazulula inkinga enqenqemeni nokwenza ngcono ikhwalithi yokukhula kwekristalu, futhi i-Semicera iphumelele ekuxazululeni ubuchwepheshe be-tantalum carbide coating (CVD), yafinyelela ezingeni eliphezulu lamazwe ngamazwe.

Ngemva kweminyaka yokuthuthuka, i-Semicera inqobe ubuchwepheshe beI-CVD TaCngemizamo ehlanganyelwe yomnyango we-R&D. Ukukhubazeka kulula ukwenzeka enqubweni yokukhula kwama-wafers e-SiC, kodwa ngemva kokusebenzisaI-TaC, umehluko ubalulekile. Ngezansi ukuqhathaniswa kwamawafa ane-TaC nangenayo, kanye nezingxenye ze-Simicera zokukhula kwekristalu eyodwa.

Izici eziyinhloko ze-tantalum carbide coated base support plate zifaka:

1. Ukuqina kwezinga lokushisa eliphezulu: I-Tantalum carbide inokuzinza okuhle kakhulu kwezinga lokushisa eliphezulu, okwenza ipuleti yokusekela eyisisekelo ehlanganisiwe ifanele izidingo zokusekela ezindaweni zokusebenza zokushisa okuphezulu.

2. Ukumelana nokugqwala: I-Tantalum carbide enamathela inokumelana nokugqwala okuhle, ingamelana nokugqwala kwamakhemikhali kanye ne-oxidation, futhi yandise impilo yesevisi yesisekelo.

3. Ukuqina okuphezulu nokumelana nokugqoka: Ukuqina okuphezulu kwe-tantalum carbide coating kunikeza ipuleti lokusekela eliyisisekelo ukumelana nokugqokwa okuhle, elifanele izikhathi ezidinga ukumelana nokugqoka okuphezulu.

4. Ukuzinza kwamakhemikhali: I-Tantalum carbide inokuqina okuphezulu ezinhlobonhlobo zamakhemikhali, okwenza ipuleti lokusekela lesisekelo eliboshwe lisebenze kahle kwezinye izindawo ezigqwalayo.

Ukusebenza kahle okuphezulu kwe-tantalum carbide coating_ kuthuthukisa ukusebenza kahle kokukhiqizwa kwezimboni futhi kunciphise izindleko zokulungisa Isithombe esifakiwe

Ingxenye ye-Tac yokukhula kwekristalu eyodwa

I-Antiwear tantalum carbide coating_ Ivikela okokusebenza ekugugeni nasekugqwaleni Isithombe Esifakiwe

I-graphite enendandatho eboshwe yi-TaC

nge-TaC nangaphandle kwayo

Ngemva kokusebenzisa i-TaC (kwesokudla)

Ngaphezu kwalokho, i-Semicera'sImikhiqizo ehlanganiswe ne-TaCbonisa impilo yesevisi ende kanye nokumelana okukhulu nezinga lokushisa eliphezulu uma kuqhathaniswaIzingubo ze-SiC.Izilinganiso zaselabhorethri ziye zabonisa ukuthi yethuI-TaC coatingsingasebenza ngokuqhubekayo emazingeni okushisa afinyelela ku-2300 degrees Celsius isikhathi eside. Ngezansi kukhona izibonelo zamasampuli ethu: