Ikhwalithi ephezulu yangokwezifiso ye-silicon carbide cantilever paddle

Incazelo emfushane:

I-Semicera Semiconductor Technology Co., Ltd. ingumphakeli ohamba phambili ogxile ekusetshenzisweni kwe-wafer kanye ne-semiconductor ethuthukisiwe.Sizinikezele ekuhlinzekeni ngemikhiqizo yekhwalithi ephezulu, ethembekile, nentsha ekukhiqizeni ama-semiconductor,imboni ye-photovoltaicnezinye izinkambu ezihlobene.

Umugqa wethu womkhiqizo uhlanganisa imikhiqizo ye-graphite ehlanganiswe ne-SiC/TaC nemikhiqizo yobumba, ehlanganisa izinto ezihlukahlukene ezifana ne-silicon carbide, i-silicon nitride, ne-aluminium oxide nokunye.

Njengomhlinzeki othembekile, siyakuqonda ukubaluleka kwezinto ezisetshenziswayo ohlelweni lokukhiqiza, futhi sizibophezele ekuletheni imikhiqizo ehlangabezana namazinga aphezulu ekhwalithi ukuze sifeze izidingo zamakhasimende ethu.

 

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Semicera iveza inkambiso yekhwalithi ephezului-silicon carbide cantilever paddlesyakhelwe ukuphakamisa izinqubo zokukhiqiza i-semiconductor. I-innovativeIsigwedlo se-SiCidizayini iqinisekisa ukuqina okukhethekile kanye nokumelana nokushisa okuphezulu, okuyenza ibe yingxenye ebalulekile yokuphatha ama-wafer ezindaweni eziyinselele ezinezinga lokushisa eliphezulu.

II-silicon carbide paddleyakhelwe ukumelana nemijikelezo eshisayo ngenkathi igcina ubuqotho besakhiwo, iqinisekisa ukuthuthwa kwe-wafer okuthembekile phakathi nezigaba ezibucayi zokukhiqizwa kwe-semiconductor. Ngamandla aphezulu emishini, lokhuisikebhe esilucwecwanakunciphisa ubungozi bokulimala kwama-wafers, okuholela ekuvuneni okuphezulu kanye nekhwalithi yokukhiqiza engaguquki.

Enye yezinto ezintsha ezibalulekile ku-Semicera's SiC paddle ilele ezinkethweni zayo zokuklama ngokwezifiso. Iklanyelwe ukuhlangabezana nezidingo ezithile zokukhiqiza, i-paddle inikeza ukuguquguquka ekuhlanganisweni nokusethwa kwemishini ehlukahlukene, okuyenza ibe yisixazululo esifanelekile sezinqubo zokwenziwa zesimanje. Ukwakhiwa okungasindi kodwa okuqinile kwenza kube lula ukuphatha futhi kunciphisa isikhathi sokusebenza, okunomthelela ekuthuthukisweni kokusebenza kahle ekukhiqizeni kwe-semiconductor.

Ngaphezu kwezakhiwo zayo ezishisayo nezemishini, i-I-silicon carbide paddleinikeza ukumelana kwamakhemikhali okuhle kakhulu, okuyivumela ukuthi isebenze ngokuthembekile ngisho nasezindaweni zamakhemikhali ezinokhahlo. Lokhu kuyenza ifaneleke ikakhulukazi ukusetshenziswa ezinqubweni ezibandakanya ukufakwa, ukufakwa, kanye nokwelashwa kwezinga lokushisa eliphezulu, lapho ukugcinwa kobuqotho besikebhe esiyisinkwa esilucwecwe kubalulekile ukuze kuqinisekiswe ukuphuma kwekhwalithi ephezulu.

 

Izakhiwo ezibonakalayo ze-Recrystallized Silicon Carbide

Impahla

Inani Elijwayelekile

Izinga lokushisa lokusebenza (°C)

1600°C (nomoya-mpilo), 1700°C (ukunciphisa imvelo)

Okuqukethwe kwe-SiC

> 99.96%

Mahhala Si okuqukethwe

< 0.1%

Ukuminyana ngobuningi

2.60-2.70 g/cm3

I-porosity ebonakalayo

< 16%

Amandla okucindezela

> 600 MPa

Amandla okugoba abandayo

80-90 MPa (20°C)

Amandla okugoba ashisayo

90-100 MPa (1400°C)

Ukunwetshwa kwe-Thermal @1500°C

4.70 10-6/°C

I-Thermal conductivity @1200°C

23 W/m•K

I-Elastic module

240 GPA

Ukumelana nokushaqeka okushisayo

Kuhle ngokwedlulele

I-Cantilever Paddle (21)
I-Cantilever Paddle (20)
fd658ca43ee41331d035aad94b7a9cc
Semicera Indawo yokusebenza
Indawo yokusebenza ye-Semicera 2
Umshini wezinsimbi
Ukucubungula kwe-CNN, ukuhlanzwa kwamakhemikhali, i-CVD coating
I-Semicera Ware House
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