Izingxenye zesigamu sesibili ze-Lower Baffles ku-Epitaxial Process

Incazelo emfushane:

Izingxenye ze-graphite ezihlanganiswe ne-SiC zemishini ye-SiC epitaxial.

Isingeniso kanye nokusetshenziswa komkhiqizo: Ishubhu ye-quartz exhunyiwe, ingadlula igesi ukushayela ukujikeleza kwesisekelo sethreyi, ukulawula izinga lokushisa

Indawo yedivayisi yomkhiqizo: ekamelweni lokusabela, hhayi ukuthintana okuqondile ne-wafer

Imikhiqizo esezingeni eliphansi: amadivayisi kagesi

Imakethe yetheminali enkulu: izimoto zamandla amasha


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-SiC CoatedIngxenye ye-Graphite Halfmooniyingxenye ebalulekile esetshenziswa ezinqubweni zokukhiqiza ze-semiconductor, ikakhulukazi kumishini ye-SiC epitaxial. Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenza ingxenye ye-halfmoon ibe nokuhlanzeka okuphezulu kakhulu, ukufana okuhle kokumboza kanye nempilo yesevisi enhle kakhulu, kanye nokumelana namakhemikhali aphezulu kanye nezakhiwo zokuzinza kokushisa.

 
Semicera Indawo yokusebenza
Indawo yokusebenza ye-Semicera 2
Umshini wezinsimbi
Ukucubungula kwe-CNN, ukuhlanzwa kwamakhemikhali, i-CVD coating
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