I-SiC cantilever paddle silicon carbide diffusion paddle

Incazelo emfushane:

I-silicon carbide paddle, eyaziwa nangokuthi i-silicon carbide cantilever paddle, i-silicon carbide cantilever beam iwuhlobo lwemikhiqizo yobumba ye-silicon carbide ngemuva kokushisa okuphakeme kuka-1850 ℃, kodwa izinga lokushisa eliphezulu le-silicon carbide ceramic yimikhiqizo ekhethekile yobumba, ngezinhlayiya ezinhle i-α-SiC. kanye nezithasiselo zicindezelwe endaweni engenalutho, ngokuthintana ne-silicon ewuketshezi ekushiseni okuphezulu, ikhabhoni endaweni engenalutho kanye ukungena kokusabela kwe-Si, ukwakheka kwe-β-SiC, Futhi kuhlanganiswe ne-α-SiC, i-silicon yamahhala yagcwalisa i-porosity, ukuze ithole izinto eziphezulu ze-ceramic; Inezici ezihlukahlukene eziphakeme ze-ceramics yezimboni.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-Semicera'sIzigwedlo ze-SiCzenzelwe ukunwetshwa okushisayo okuncane, okuhlinzeka ukuzinza nokunemba ezinqubweni lapho ukunemba kobukhulu kubalulekile. Lokhu kubenza balungele izicelo laphoizinkwa eziwucwecwezingaphansi kwemijikelezo yokufudumeza nokupholisa ephindaphindiwe, njengoba isikebhe esicwecwana sigcina ubuqotho baso besakhiwo, siqinisekisa ukusebenza okungaguquki.

Ihlanganisa i-Semicera'si-silicon carbide diffusion paddlesemgqeni wakho wokukhiqiza kuzothuthukisa ukwethembeka kwenqubo yakho, ngenxa yezakhiwo zazo ezishisayo namakhemikhali aphezulu. Lawa ma-paddles alungele ukusabalalisa, i-oxidation, nezinqubo zokudonsa, okuqinisekisa ukuthi ama-wafers aphathwa ngokucophelela nangokunemba kuso sonke isinyathelo.

Ukuqamba okusha kusemongweni we-Semicera'sIsigwedlo se-SiCumklamo. Lawa ma-paddles enzelwe ukuthi alingane kalula emishinini ye-semiconductor ekhona, ehlinzeka ngokusebenza okuthuthukisiwe kokuphatha. Isakhiwo esingasindi kanye nokwakheka kwe-ergonomic akuthuthukisi nje kuphela ezokuthutha eziyilucwecwana kodwa futhi kunciphisa isikhathi sokuphumula sokusebenza, okuholela ekukhiqizweni okulula.

Izakhiwo ezibonakalayo ze-Recrystallized Silicon Carbide
Impahla	Inani Elijwayelekile
Izinga lokushisa lokusebenza (°C)	1600°C (nomoya-mpilo), 1700°C (ukunciphisa imvelo)
Okuqukethwe kwe-SiC	> 99.96%
Mahhala Si okuqukethwe	< 0.1%
Ukuminyana ngobuningi	2.60-2.70 g/cm³
I-porosity ebonakalayo	< 16%
Amandla okucindezela	> 600 MPa
Amandla okugoba abandayo	80-90 MPa (20°C)
Amandla okugoba ashisayo	90-100 MPa (1400°C)
Ukunwetshwa kwe-Thermal @1500°C	4.70 10^-6/°C
I-Thermal conductivity @1200°C	23 W/m•K
I-Elastic module	240 GPA
Ukumelana nokushaqeka okushisayo	Kuhle ngokwedlulele